CRYO-U4H

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Excellent pumping performance for a 4-inch cryopump
High pumping speed improves the pumping efficiency and productivity.
Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
Up to four units can be run by one compressor.
Customized design is available to fit your needs.

Specification

Pumping speed20℃)	Nitrogen	L/s	450
	Hydrogen		500
	Argon		370
	Water		1,100
Ultimate pressure	Pa		10^-7
Maximum flow rate	Argon	Pa・L/s	1.3×10³
Pumping capacity	Argon	Pa・L	1.0×10⁷
Pumping capacity	Hydrogen	Pa・L	1.5×10⁵
Cooldown time	min(50/60Hz)		45/50
Weight		Kg	14.5

Dimensions (unit:mm)

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30