A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
- Excellent pumping performance for a 4-inch cryopump
- High pumping speed improves the pumping efficiency and productivity.
- Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
- Up to four units can be run by one compressor.
- Customized design is available to fit your needs.
|Maximum flow rate||Argon||Pa・L/s||1.3×103|
Vacuum gauge - Selection guide
Cryopump - Usage instructions
Cryopump - Safety Instructions
Cryopump - Trouble shooting
Cryopumps - Seven key points for maintenance
Launch of Cryogenic trap using a helium refrigerator to replace CFC substitute cold trap
World's Largest Cryopump ( 52 type ) starts operation at the satellite equipment test site
Rapid low-temperature regeneration ... Reduction of regeneration time
Applications and examples of effective use of Super Traps
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