Cryo Pump

CRYO-U Series

CRYO-U4H

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

  • Excellent pumping performance for a 4-inch cryopump
  • High pumping speed improves the pumping efficiency and productivity.
  • Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
  • Up to four units can be run by one compressor.
  • Customized design is available to fit your needs.

Specification

Pumping speed20℃) Nitrogen L/s 450
Hydrogen 500
Argon 370
Water 1,100
Ultimate pressure Pa 10-7
Maximum flow rate Argon Pa・L/s 1.3×103
Pumping capacity Argon Pa・L 1.0×107
Hydrogen 1.5×105
Cooldown time min(50/60Hz) 45/50
Weight Kg 14.5

Dimensions (unit:mm)

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