Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Light-weight and compact. Our smallest standard product.
  • Suitable for small vacuum systems in the laboratory.
  • Multiple operation (up to 3 units)
  • Ultra-high vacuum (10-8Pa or lower)


Pumping speed(20℃) Nitrogen L/s 750
Hydrogen 1,100
Argon 620
Water 2,100
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.1×103(7.9)
Hydrogen 1.1×102(0.8)
Pumping capacity Argon Pa・L(Torr・L) 5.6×107(4.2×105)
Hydrogen 3.1×105(2.3×103)
Cooldown time (Power cycles) min(Hz) 80/70(50/60)
Mounting flange UVG-150,UFC-203
compressor unit C10T,C10AT
Weight Kg 19

*Maintenance interval:16,000 hours

Dimensions (unit:mm)


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