CRYO-U6H

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Light-weight and compact. Our smallest standard product.
Suitable for small vacuum systems in the laboratory.
Multiple operation (up to 3 units)
Ultra-high vacuum (10-8Pa or lower)

Specification

Pumping speed(20℃)	Nitrogen	L/s	750
	Hydrogen		1,100
	Argon		620
	Water		2,100
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.1×10³(7.9)
	Hydrogen		1.1×10²(0.8)
Pumping capacity	Argon	Pa・L(Torr・L)	5.6×10⁷(4.2×10⁵)
	Hydrogen		3.1×10⁵(2.3×10³)
Cooldown time (Power cycles)	min(Hz)		80/70(50/60)
Mounting flange			UVG-150,UFC-203
compressor unit			C10T,C10AT
Weight		Kg	19

*Maintenance interval：16,000 hours

Dimensions (unit:mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Specification

Pumping speed(20℃)	Nitrogen	L/s	750
	Hydrogen		1,100
	Argon		620
	Water		2,100
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.1×10³(7.9)
	Hydrogen		1.1×10²(0.8)
Pumping capacity	Argon	Pa・L(Torr・L)	5.6×10⁷(4.2×10⁵)
	Hydrogen		3.1×10⁵(2.3×10³)
Cooldown time (Power cycles)	min(Hz)		80/70(50/60)
Mounting flange			UVG-150,UFC-203
compressor unit			C10T,C10AT
Weight		Kg	19

*Maintenance interval：16,000 hours