Cryo Pump

CRYO-U Series

CRYO-U8H-U

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

  1. Interchangeable with the CT-8 from CTI.
  2. High hydrogen pumping capacity.
  3. Multiple operation (up to 3 units)

Specifications

Pumping speeds(20degrees) Nitrogen L/s 1,700
Hydrogen 2,700
Argon 1,400
Water 4,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.2×103(8.9)
Hydrogen 2.4×102(1.8)
Pumping capacity Argon Pa・L(Torr・L) 1.0×108(7.6×105)
Hydrogen 1.0×106(7.6×103)
Cooldown time min(Hz) 100/90(50/60)
Mounting flange UVG-200,6BANSI,UFC-253
Compressor unit C10T,C10AT
Weight of cryopump Kg 20.8

*Maintenance interval: every 16,000 hours

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