Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Light-weight and compact. A large number have already been shipped. Our standard cryopump.
  • For experimental systems and small-size equipments.
  • Multiple operation (up to 3 units)
  • Ultra-high vacuum (10-8 Pa or lower)


Pumping speed(20℃) Nitrogen L/s 1,700
Hydrogen 2,700
Argon 1,400
Water 4,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.2×103(8.9)
Hydrogen 2.4×102(1.8)
Pumping capacity Argon Pa・L(Torr・L) 1.0×108(7.6×105)
Hydrogen 1.0×106(7.6×103)
Cooldown time
(Power cycle)
min(Hz) 100/90(50/60)
Mounting flange UVG-200,6BANSI,UFC-253
Compressor unit C10T,C10AT
Weight Kg 20.8

*Maintenance interval:16,000 hours

Dimensions (unit:mm)


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