CRYO-U8HL

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Completely compatible with CTI cryopump CT-8.
Hydrogen emission characteristics are superior to CT-8
Multiple operation (up to 3 units)

Specifications

Pumping speeds(20℃)	Nitrogen	L/s	1,700
	Hydrogen		2,700
	Argon		1,400
	Water		4,000
	Pa(Torr)		10^-7(10^-9)
	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
	Hydrogen		2.4×10²(1.8)
Pumping capacity	Argon	Pa・L(Torr・L)	1.0×10⁸(7.6×10⁵)
	Hydrogen		1.0×10⁶(7.6×10³)
Cooldown time (Power cycle)	min(Hz)		100/90(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
Weight		Kg	20.8

*Maintenance intervals：16,000 hours

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Specifications

Pumping speeds(20℃)	Nitrogen	L/s	1,700
	Hydrogen		2,700
	Argon		1,400
	Water		4,000
	Pa(Torr)		10^-7(10^-9)
	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
	Hydrogen		2.4×10²(1.8)
Pumping capacity	Argon	Pa・L(Torr・L)	1.0×10⁸(7.6×10⁵)
	Hydrogen		1.0×10⁶(7.6×10³)
Cooldown time (Power cycle)	min(Hz)		100/90(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
Weight		Kg	20.8

*Maintenance intervals：16,000 hours