Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Suitable for sputtering process.
  • The displacement of argon is about 2.5 times that of the conventional model (U8H).
  • The hydrogen exhaust rate has improved to about 1.2 times that of the conventional model (U8H).
  • The interval to playback becomes longer, contributing to the improvement of equipment availability.
  • Multiple operation (up to 3 units)


Pumping speeds(20℃) Nitrogen L/s 1,700
Hydrogen 3,200
Argon 1,400
Water 4,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.2×103(8.9)
Hydrogen 2.4×102(1.8)
Pumping capacity Argon Pa・L(Torr・L) 2.5×108(1.9×106)
Hydrogen 1.0×106(7.8×103)
Cooldown time
(Power cycle)
min(Hz) 125/115(50/60)
Mounting flange UVG-200,6BANSI,UFC-253
Compressor unit C10T,C10AT
Kg 33.2

*Maintenance interval:16,000 hours

Dimenssions (Unit:mm)


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