CRYO-U8HSP

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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Suitable for sputtering process.
The displacement of argon is about 2.5 times that of the conventional model (U8H).
The hydrogen exhaust rate has improved to about 1.2 times that of the conventional model (U8H).
The interval to playback becomes longer, contributing to the improvement of equipment availability.
Multiple operation (up to 3 units)

Specification

Pumping speeds(20℃)	Nitrogen	L/s	1,700
	Hydrogen		3,200
	Argon		1,400
	Water		4,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
	Hydrogen		2.4×10²(1.8)
Pumping capacity	Argon	Pa・L(Torr・L)	2.5×10⁸(1.9×10⁶)
	Hydrogen		1.0×10⁶(7.8×10³)
Cooldown time (Power cycle)	min(Hz)		125/115(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
		Kg	33.2

*Maintenance interval：16,000 hours

Dimenssions (Unit:mm)

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Features

Suitable for sputtering process.

The displacement of argon is about 2.5 times that of the conventional model (U8H).

The hydrogen exhaust rate has improved to about 1.2 times that of the conventional model (U8H).

The interval to playback becomes longer, contributing to the improvement of equipment availability.

Multiple operation (up to 3 units)

Specification

Pumping speeds(20℃)	Nitrogen	L/s	1,700
	Hydrogen		3,200
	Argon		1,400
	Water		4,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
	Hydrogen		2.4×10²(1.8)
Pumping capacity	Argon	Pa・L(Torr・L)	2.5×10⁸(1.9×10⁶)
	Hydrogen		1.0×10⁶(7.8×10³)
Cooldown time (Power cycle)	min(Hz)		125/115(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
		Kg	33.2

*Maintenance interval：16,000 hours