Vacuum Pumping System

DEPOX Series

VFR-200M/X

アルバック機工

It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.

Features

  • The vacuum chamber can be opened without stopping the main pump.
  • Maintenance is easy, because it is made of few parts included a three way valve.
  • Improved system scalability by using new rack which can install optional items such as vacuum gauge.
  • Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.
  • It is easily moving vacuum pumping system with casters.
  • The safety of the installation can be secured with adjusters.

Specification

Model
VFR-200M/X
Ultimate pressure
10-4Pa
10-5Pa(LN2)
Main pump
Oil diffusion pump(air cooling) 200 L/sec
Backing pump
Oil Rotary pump 100 L/min
Main valve
65A Butterfly valve
Sub valve
Three way valve
Inlet flange
VG-65
Weight
120kg
External dimensions (W×D×H)
730mm(W)×584mm(D)×804mm(H)
Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.

Utility

Model VFR-200M/X
Power required
Single phase 100V 1.4kVA
Ground terminal
D grade (ground resistance/100MΩ or less)
Connection
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m

Oil diffusion pump

ph_dpf200.jpg

Model DPF-200
Ultimate pressure
10-5Pa
Maximum evacuation capacity
200L/sec
Critical back-pressure
20Pa
Required power
Single phase 100V 0.45kW
Recommended oil
SX 70cc
Weight
5kg
Inlet flange
VG-65
Outlet flange
Φ27mm
Cooling method
Air cooling

Dimension drawing

zu_vfr200mx.gif

> CAD data download(DXF)

Exhaust System Drawing

haikizu_vfr200mx.gif

Optional parts

zu_vfr200mx_ope.gif

> Optional parts site

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