Vacuum Pumping System

DEPOX Series

VTS-350M/X

アルバック機工

DEPOX series / Turbo molecular pump + Scroll pump

It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.

Features

  • The vacuum chamber can be opened without stopping the main pump.
  • Maintenance is easy, because it is made of few parts included a three way valve.
  • Improved system scalability by using new rack which can install optional items such as vacuum gauge.
  • It is easily moving vacuum pumping system with casters.
  • The safety of the installation can be secured with adjusters.

Specification

Model
VTS-350M/X
Ultimate pressure
10-4Pa
10-5Pa(LN2)
Main pump
Turbo molecular pump(air cooling) 345 L/sec
Backing pump
Scroll pump 250 L/min
Main valve
100A Butterfly valve
Sub valve
Three way valve
Inlet flange
VG-100
Weight
135kg
External dimensions (W×D×H)
730mm(W)×584mm(D)×804mm(H)
Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.

Utility

Model
VTS-350M/X
Power required
Single phase 100V 0.9kVA
Ground terminal
D grade (ground resistance/100MΩ or less)
Connection
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m

Dimension drawing

zu_vts350mx.gif

> CAD data download(DXF)

Exhaust System Drawing

haikizu_vts350mx.gif

Optional parts

zu_vts350mx_ope.gif

> Optional parts site

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