Vacuum Pumping System

VPT Series

VPT-060

アルバック機工

VPT Series / Turbo Molecular Pump + Dry Vacuum Pump

A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.

Features

  • It is a completely dry exhaust unit.
  • The Setup space is compact.

Specification

Model
VPT-060
Ultimate pressure
10-5 Pa
Main pump Turbo molecular pump(air cooling)60L/sec
Backing pump Diaphragm type vacuum pump 20 L/min
Inlet flange ISO63(Option:KF-40)
Weight 17kg
External dimensions (W×D×H) 340mm(W)×340mm(D)×355mm(H)
Ionization vacuum gauge ? Pirani vacuum gauge are options.
Depending on the conditions of use, performance may be degraded.

Utility

Model
VPT-060
Power required
Single phase 100V 0.3kVA
Ground terminal
D grade (ground resistance/100MΩ or less)
Connection
Vinyl cabtyre cable (with a plug) 2m

Dimension drawing

zu_vpt060.gif

> CAD data download(DXF)

Exhaust System Drawing

zu_vpt060_flow.gif

Optional parts

zu_vpt060_op.gif

> Optional parts site

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