Vacuum Pumping System

VPT Series



A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.


  • It is a completely dry exhaust unit.
  • The Setup space is compact.


50Hz 60Hz
Ultimate pressure 10-5 Pa
Weight 17 kg
Inlet flange ISO63(Option:KF-40)
Ambient temperature 8~38 ℃
External dimensions 340 mm(W) × 340 mm(L) × 355 mm(H)
RoHS directive
*Ionization vacuum gauge, Pirani vacuum gauge, and piping parts are optional.
*Depending on the conditions of use, performance may be degraded.

Dimension drawing


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