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Ion Pump
PST Series
PST-030CU/AU
アルバック
Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps) - High pumping speed attained the ultra-high vacuum
- Pumping down to ultra-high vacuum in a short period of time
- Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
| Evacuation speed to 1 x 10-7(reproduced evacuation speed) |
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| Final pressure | 10-9Pa order | ||||
| Operation pressure | <8.0×10-3Pa(recommended value) (Maximum operation pressure 1×10-2Pa) *Using GST-07L controller |
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| Volume | 約6.7 X 10-4m3approx | ||||
| Number of pump elements | CX cell (x 1), AX cell (x 1) | ||||
| Connection flange model | UFC070 | ||||
| Applied voltage | DC+7.5kV | ||||
| Standard bake-out temperature | 250°C | ||||
| Weight | 約9.5KG approx | ||||
| External dimensions W×D×H | 103×183×187 mm |
