Ion Pump

PST Series



Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.


  • Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)


  • Accelerators
  • Electron microscopes
  • Analyzers


Evacuation speed to 1 x 10-7(reproduced evacuation speed)
N2: 0.03m3/s(CU ・ AU)
Final pressure 10-9Pa order
Operation pressure <8.0×10-3Pa(recommended value)
(Maximum operation pressure 1×10-2Pa)
*Using GST-07L controller
Volume 約6.7 X 10-4m3approx
Number of pump elements CX cell (x 1), AX cell (x 1)
Connection flange model UFC070
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C
Weight 約9.5KG approx
External dimensions W×D×H 103×183×187 mm


"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept