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Ion Pump
PST Series
PST-110AU
アルバック
Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps) - High pumping speed attained the ultra-high vacuum
- Pumping down to ultra-high vacuum in a short period of time
- Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specification
|
Regenerating pumping speed |
N2 | 0.06ｍ3 /sec ※Max 0.11ｍ3 /sec |
| Ar | - | |
| Ultimate pressure | 10-9Pa | |
| Operating pressure(*1) | Recommended value | ＜4.5×10-3Pa |
| Inner volume | 6.5×10-3ｍ3 | |
| Element number | 2式 ※Replaceable |
|
| Applied voltage | DC+7.5kv | |
| Discharge intensity characteristic value | 6.6A/Pa | |
| Connection flange type | UFC152 | |
| Bake-out temperature | 250℃ | |
| Power for Heater Unit | No setting | |
| Weight | 36.5ｋｇ | |
| Dimensions W×D×H | 171×387×293mm | |
| Operating environment | Temperature range | 5～40℃ |
| Humidity range | Less than 85% (not condensing) | |
| Pump fixing bolt hole | M6 × 4pcs Depth15mm |
|
| Recommended controller | GST-07L-B | |
*1）During the time of use of the GST-07L-B Type controller
