Ion Pump

PST Series



Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.


  • Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)


  • Accelerators
  • Electron microscopes
  • Analyzers


Regenerating pumping speed
(at 1.0×10-7 Pa)

N2 0.06m3 /sec
※Max 0.11m3 /sec
Ar -
Ultimate pressure 10-9Pa
Operating pressure(*1) Recommended value <4.5×10-3Pa
Inner volume 6.5×10-33
Element number 2式
Applied voltage DC+7.5kv
Discharge intensity characteristic value 6.6A/Pa
Connection flange type UFC152
Bake-out temperature 250℃
Power for Heater Unit No setting
Weight 36.5kg
Dimensions W×D×H 171×387×293mm
Operating environment Temperature range 5~40℃
Humidity range Less than 85% (not condensing)
Pump fixing bolt hole M6 × 4pcs
Recommended controller GST-07L-B

*1)During the time of use of the GST-07L-B Type controller


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