Ion Pump

PST Series



Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high and extremely high vacuums on the order of 10-10 Pa. They are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.


  • Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)


  • Accelerators
  • Electron microscopes
  • Analyzers


Evacuation speed to(reproduced evacuation speed)
N2 0.20m3/s(CX2・AX2)
Ar: 0.02m3/s(CX2)
Final pressure 10-10Pa order
Operation pressure <3.8×10-3Pa(recommended value)
(Maximum operation pressure 1×10-3Pa)
*Using GST-07L controller
Volume 0.011m3 approx.
Number of pump elements CX2 cells (x 2), AX2 cells (x 2)
Connection flange model UFC203
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C
Weight 65kg approx.(with heater, cover)
External dimensions W×D×H 296×361×376 mm
Power required by heater unit Single-phase 200 V, 600 W approx.


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