Ion Pump

PST Series

PST

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Sputter ion pumps are used to create ultra-high vacuum for various analyzers and accelerators.
ULVAC's sputter ion pumps aredesigned to apply new elements and optimize magnetic fields for improving evacuation characteristics at ultra-high and extremely high vacuum.

Features

  • Available for ultimate pressure (10-9Pa order) ULVAC achieved the order with
    test dome complying with ISO standards.
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra high vacuum
    (discharging maintained down to the ultra-high vacuum)

Applications

  • Accelerators
  • Electron microscopes
  • Electron drawing device
  • Precision analyzers which dislike vibration

Specifications

Model PST-030CU PST-030AU PST-050CU PST-050AU PST-100CX PST-100AX
Target gas Standard gas Inert gas Standard gas Inert gas Standard gas Inert gas
Pumping speed*
(Regenerating
evacuation speed)
0.03m3/s
(N2 gas
pumping)
0.013m3/s
(Ar gas
pumping)
0.045m3/s
(N2 gas
pumping)
0.016m3/s
(Ar gas
pumping)
0.10m3/s
(N2 gas
pumping)
0.05m3/s
(Ar gas
pumping)
Ultimate pressure 10-9Pa
Operating pressure*3 <8.0×10-3Pa <5.0 x 10-3Pa
Inner volume 0.67 X 10-3m3 1.3x10-3m3 3.3x10-3m3
Element number CU sell×1 AU sell×1式 CU sell×1 AU sell×1 CX sell×1 AX sell×1
Connection flange type UFC070 UFC114 UFC152
Applied voltage DC+7.5kV
Power for
heater
Single phase No setting AC200V, 300W AC200V, 320W
Bake-out temparature 250℃
Weight 9.5 kg 12kg 37kg
Dimension W x H x D 103×183×187 mm 153×204×241mm 155×336×340mm
Operating
environment
Temparature 5~40℃
Humidity 85% or less(without condensation)
Pump fixing bolt hole 4 points-M5
Depth 10mm
4 points-M8
Depth 6mm
Recommended controller GST-07L-B

* Value when using GST-07L.

Model PST-110AU PST-200CXII PST-200AXII PST-400CXII PST-400AXII
Target gas Standard gas Standard gas Inert gas Standard gas Inert gas
Pumping speed*
(Regenerating
evacuation speed)
0.11m3/s
(N2 gas
pumping)
0.2m3/s
(N2 gas
pumping)
0.02m3/s
(Ar gas
pumping)
0.36m3/s
(N2 gas
pumping)
0.19m3/s
(Ar gas
pumping)
Ultimate pressure 10-9Pa 10-10Pa
Operating pressure*3 <4.5x10-3Pa <3.8x10-3Pa <3.0x10-3Pa
Inner volume 6.5x10-3m3 11x10-3m3 14x10-3m3
Element number AU sellx1 CX sell×2 AX sell×2 CX sell×4 AX sell×4
Connection flange type UFC152 UFC203
Applied voltage DC+7.5kV
Power
for heater
Single phase No setting AC200V, 600W AC200V, 800W
Bake-out temparature 250℃
Weight 36.5kg 65kg 124kg
Dimension W x H x D 171×387×293mm 296×361×376mm 296×544×376mm
Operating
environment
Temparature 5~40℃
Humidity 85% or less(without condensation)
Pump fixing bolt hole 4 points-M6
Depth 15mm
4 points-M8
Depth 15mm
6 points-M8
Depth 15mm
Recommended controller GST-07L-B

* Value when using GST-07L.

Controller of PST series

Model GST-07L-B
Input specification Input voltage,
current
AC100~115V±10% ・ 50/60Hz~3.0A
AC200~240V±10% ・ 50/60Hz~1.5A
Leakage current 6mA以下
Input voltage
reshuffing
Manual(Operation with the power supply inside DIP switch)
Output specification Rated voltage DC+7.5kV
Output current Rated current Less than DC30mA
Output polarity Positive polarity
Output properties Constant voltage characteristic
Display method Digital display (7-segment LEDs)
Display contents Output current 1µA~30mA(Automatic selection of two ranges: mA, µA)
Output voltage 0.0~7.5 kV DC
Pressure display 1×10-8~1×10-2 Pa
1×10-10~1×10-4 mbar
Pressure set point 2 points
Protection functions Error display/various protection functions are available
High voltage(HV) output shutdown(ERR. 0 to 8 light)
Restoration after power failure Automatic restroration after power failure is available
when the HV-ON switch is ON.
External control functions Various input/output functions are available(with REMOTE connector),
RS-232C communication control is equipped.
Monitor terminal Output of signals proportionate to 7-segment panel display,
DC 0 to 10V full scale for each range
Allowable load impedance 100kΩ or more.
REMOTE/LOCAL Switchable on the front control panel
Cooling method Foreced air cooling
Weight Body 4.0kg
Dimensions W×H×D 200 x 99 x 370 mm (excluding rack mounting fixtures)
Ambient operating
conditions
Temperature 0 to 40℃
Humidity Less than 85% (not condensing)
Applicable standard CE, cTUVus

Pumping Speed Curves

  • PST-030CU_AU
PST-030CU-AU_curve.png
  • PST-050CU_AUPST-050CU_curve.png
  • PST-100CX_AX
PST-100CX-AX_curve.png
  • PST-110AUPST-110AU_curve.png
  • PST-200CXII_AXIIPST-200CX-AX_curve.png
  • PST-400CXII_AXIIPST-400CX_curve.png

Dimension drawing

  • PST-030CU_AUPST-030_JE1.png
  • PST-050CU_AUPST-050_E.png
  • PST-100CX_AXPST-100_E.png
  • PST-110AUPST-110_JE.png
  • PST-200CXII_AXIIPST-200_E.png
  • PST-400CXII_AXIIPST-400_E.png

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