ULK

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ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.

Features

A steady high vacuum pump without mechanical moving parts.
A mechanism preventing oil backflow to the backing pump is included.
A mechanism which stop flow of operating fluid to auxiliary pump.

Applications

・Vacuum evaporator
・High vacuum experimental devices

Specifications

Model ULK-04A ULK-06A ULK-10A ULK-14A
Pumping
speed
550
L/sec
500
L/sec
1200
L/sec
1100
L/sec
3400
L/sec
3000
L/sec
5400
L/sec
4900
L/sec
Ultimate
pressure *1
<2.6×10-5
Pa
<2.6×10-6
Pa
<2.6×10-5
Pa
<2.6×10-6
Pa
<2.6×10-5
Pa
<2.6×10-6
Pa
<2.6×10-5
Pa
<2.6×10-6
Pa
Maxium
forepressure
40 Pa 60 Pa 40 Pa 60 Pa 35 Pa 40 Pa 30 Pa 30 Pa
Heating
up time
9 min 8.5 min 16.5 min 15 min 20 min 20 min 25 min 25 min
Oil *2 ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
Oil capacity 0.15 L 0.35 L 0.8 L 1.5 L
Cooling
water
temperature
19℃~25℃
Water
connections
Rc 1/4" Rc 1/4" Rc 3/8" Rc 3/8"
Water
capacity
1 L/min 1 L/min 1 L/min 1.5 L/min 2.5 L/min 3 L/min 2.5 L/min 3.5 L/min
Voltage 200V/1Φ
Pump power 0.55 kW 0.73 kW 0.9 kW 1.2 kW 2 kW 2.4 kW 2.25 kW 2.4 kW
Heater type Plate Plate Plate Plate
Standard
backing
pump *3
VD151/
VD201
VD30C/VD40C/
VD60C
VD90C VS1501/VS2401/
PKS-030
PVD-180/
PVD-360
VS1501
PKS-016/
PKS-030
Dimensions
*4
A 175 mm 250 mm 340 mm 340 mm
B 150 mm 180 mm 240 mm 240 mm
H 344 mm 449 mm 650 mm 670 mm
Inlet VG100 VG150 VG250 VG350
Outlet VG25 VG40 VG80 VG80
Weight 7.5 Kg 13.5 Kg 47 Kg 56 Kg
Oil level gage Without Without View port
Slight glass
Slight glass
Themal switch
option
With With With With
Themal switch
operating
temperature
250 250 180 180

*1 Ultimate pressure is measured with an ionization vacuum gauge when the cooling water
  temperature is 20 ° C.
*2 D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump
 oil which heat-resistant stability is high in.
*3 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,
  but,in consideration of time of starting pressure,it is good to use a big backing pump.
*4 Please confirm other dimensions by CAD data placing
  ( 2D Drawing , 3D Drawing )in the ULVAC,Inc.website.

Pumping Speed Curves

ULK-04A / 06ALUK-04A,06A_curves_1.png ULK-10A / 14ALUK-10A,14A_curves_1.png

Dimension drawing

ULK-04A,14A_size.png
ULK-04A ULK-06A ULK-10A ULK-14A
A 175 mm 250 mm 340 mm 340 mm
B 150 mm 180 mm 240 mm 240 mm
C 342.5 mm 449 mm 650 mm 670 mm

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