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Oil Diffusion Ejector Pump

BW Series

BW-14

アルバック

This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.

Features

  • For preventing inside of vacuum chamber from the oil steam contamination from the oil diffusion pump.
  • It is designed to minimize exhaust resistance.
  • By setting the adapter for BW-04B and BW-06B, volume of the oil stem backflow volume can be suppressed additionally.

Specifications

Model BW-02 BW-04B BW-06B BW-10 BW-14 BW-20 BW-22 BW-36 BW-52
Conductance [L/sec] 100 940 2200 3130 5000 13000 14000 54000 75000
Dimensions [mm] D φ120 φ149 φ199 φ350 φ450 φ625 φ680 φ1065 φ1480
T 16 28 28 44 50 152 101 113 165
t 16 25 25 22 22 24 26 28 35
Water connections Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Rc 3/8 Rc 3/8 Rc 1/2
Water capacity
[L/min]
1.5 0.7 1 2 2 3 3 5 5
Weight[kg] 1 1.3 1.7 7.6 11 22 28 66 200

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