Oil Diffusion Ejector Pump
ULK
アルバック
ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.
Features
A steady high vacuum pump without mechanical moving parts.
A mechanism preventing oil backflow to the backing pump is included.
A mechanism which stop flow of operating fluid to auxiliary pump.
Applications
・Vacuum evaporator
・High vacuum experimental devices
Specifications
| Model | ULK-04A | ULK-06A | ULK-10A | ULK-14A | |||||
| Pumping speed |
550 L/sec |
500 L/sec |
1200 L/sec |
1100 L/sec |
3400 L/sec |
3000 L/sec |
5400 L/sec |
4900 L/sec |
|
| Ultimate pressure *1 |
＜2.6×10-5 Pa |
＜2.6×10-6 Pa |
＜2.6×10-5 Pa |
＜2.6×10-6 Pa |
＜2.6×10-5 Pa |
＜2.6×10-6 Pa |
＜2.6×10-5 Pa |
＜2.6×10-6 Pa |
|
| Maxium forepressure |
40 Pa | 60 Pa | 40 Pa | 60 Pa | 35 Pa | 40 Pa | 30 Pa | 30 Pa | |
| Heating up time |
9 min | 8.5 min | 16.5 min | 15 min | 20 min | 20 min | 25 min | 25 min | |
| Oil *2 | ULVOIL D-11 |
ULVOIL D-31 |
ULVOIL D-11 |
ULVOIL D-31 |
ULVOIL D-11 |
ULVOIL D-31 |
ULVOIL D-11 |
ULVOIL D-31 |
|
| Oil capacity | 0.15 L | 0.35 L | 0.8 L | 1.5 L | |||||
| Cooling water temperature |
19℃～25℃ | ||||||||
| Water connections |
Rc 1/4" | Rc 1/4" | Rc 3/8" | Rc 3/8" | |||||
| Water capacity |
1 L/min | 1 L/min | 1 L/min | 1.5 L/min | 2.5 L/min | 3 L/min | 2.5 L/min | 3.5 L/min | |
| Voltage | 200V/1Φ | ||||||||
| Pump power | 0.55 kW | 0.73 kW | 0.9 kW | 1.2 kW | 2 kW | 2.4 kW | 2.25 kW | 2.4 kW | |
| Heater type | Plate | Plate | Plate | Plate | |||||
| Standard backing pump *3 |
VD151/ VD201 |
VD30C/VD40C/ VD60C |
VD90C | VS1501/VS2401/ PKS-030 |
|||||
| PVD-180/ PVD-360 |
VS1501 | ||||||||
| PKS-016/ PKS-030 |
|||||||||
| Dimensions *4 |
A | 175 mm | 250 mm | 340 mm | 340 mm | ||||
| B | 150 mm | 180 mm | 240 mm | 240 mm | |||||
| H | 344 mm | 449 mm | 650 mm | 670 mm | |||||
| Inlet | VG100 | VG150 | VG250 | VG350 | |||||
| Outlet | VG25 | VG40 | VG80 | VG80 | |||||
| Weight | 7.5 Kg | 13.5 Kg | 47 Kg | 56 Kg | |||||
| Oil level gage | Without | Without | View port Slight glass |
Slight glass | |||||
| Themal switch option |
With | With | With | With | |||||
| Themal switch operating temperature |
250 | 250 | 180 | 180 | |||||
*1 Ultimate pressure is measured with an ionization vacuum gauge when the cooling water
temperature is 20 ° C.
*2 D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump
oil which heat-resistant stability is high in.
*3 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,
but,in consideration of time of starting pressure,it is good to use a big backing pump.
*4 Please confirm other dimensions by CAD data placing
（ 2D Drawing , 3D Drawing ）in the ULVAC,Inc.website.
Pumping Speed Curves
ULK-04A / 06A |
ULK-10A / 14A |
Dimension drawing
| ULK-04A | ULK-06A | ULK-10A | ULK-14A | |
| A | 175 mm | 250 mm | 340 mm | 340 mm |
| B | 150 mm | 180 mm | 240 mm | 240 mm |
| C | 342.5 mm | 449 mm | 650 mm | 670 mm |
