Oil Diffusion Ejector Pump

PFL Series

PFL

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ULVAC oil diffusion pump PFL-type is designed and manufactured based on our extensive research and manufacturing experience. We meet customer's needs with 4 models line-up including 22B to 52B which are used in many high-vacuum production facilities, and its practical performance is highly appreciated.

Features

・Excellent pumping speed
・Low back-streaming of the operating fluid
・Minimized power required and fluid capacity to ensure low operating cost
・Easy maintenance
・Reliable pump body construction

Specifications

Model PFL-22 PFL-22TM PFL-36 PFL-52
Pumping speed 10,000 L/sec 10,000 L/sec 34,000 L/sec 70,000 L/sec
Ultimate pressure *1 3.0×10-4 Pa
Maxium forepressure 16 Pa 6.7 Pa 16 Pa
Heating up time 40 min 60 min 60 min
Oil ULVOIL D-11
Oil capacity 5 L 13 L 27 L
Cooling water temperature 19~25℃
Water connections Rc 1/2×2 Rc 1/2×2 Rc 1/2×2 Rc 1/2×4
Rc 3/8×2
Water capacity 12 L/min 15 L/min 38 L/min 50 L/min
Voltage 200V / 3φ
Pump power 8 kW 10 kW Start-Up 22 kW Start-Up 45 kW
Stationary
operation
(Normal) 11 kW
Stationary
operation
(Normal) 30 kW
Heater type coiled element
heater
coiled element
heater
coiled element
heater
coiled element
heater
Standard backing pump *2 PMB-040C+PKS-070
(PMB1200D+PKS-030)
PMB-040C+
PKS-070
(PMB1200D+
PKS-070)
(PMB2400D+
PKS-070)
PMB-060C+
PKS-070×2台
PMB2400D+
PKS-070
Dimensions *3 A 480 mm 480 mm 725 mm 1,000 mm
B 630 mm 630 mm 1,022 mm 2,000 mm
H 1,330 mm 1,330 mm 1,732 mm 2,845 mm
Inlet VG550 VG550 VG900 VG相当 52inch
Outlet VG150 VG200 VG250 VG350
Weight 290 Kg 650Kg 1400Kg
Oil level gage View port
(Slight glass)
View port
(Slight glass)
View port
(Slight glass)
Themal switch option available available available
Themal switch operating temperature 180 ℃ 110 ℃ 110 ℃

Water Cooling Baffle(PFL)

Model BW-22 BW-36 BW-52
Conductance 14,000 L/sec 54,000 L/sec 75,000 L/sec
Dimensions *3 D φ680 mm φ1065 mm φ1480 mm
T 101 mm 113 mm 165 mm
t 26 mm 28 mm 35 mm
Water connections Rc 3/8 Rc 3/8 Rc 1/2
Water capacity 3L/min 5L/min 5L/min
Weight 28 kg 66 kg 200 kg

*1 Ultimate pressure is measured with an ionization vacuum gauge when the cooling water
  temperature is 20 ° C.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,
  but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing ( 2D Drawing , 3D Drawing )
  in the ULVAC,Inc.website.

Pumping Speed Curves

  • PFL-22

PFL-22_TM_curve.png
  • PFL-36 , PFL-52

PFL-36_52_curve.png

Dimension drawing

PFL-36_52_size.png

PFL-22 , PFL-22TM PFL-36 PFL52
A 480 mm 725 mm 1000 mm
B 630 mm 1022 mm 2000 mm
H 1330 mm 1732 mm 2845 mm

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