Oil Diffusion Ejector Pump

ULK Series

ULK-04A (Oil D-31)

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ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.

Features

  • Designed for large critical back-pressure
  • Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
  • Use hose flanges (except for vent flanges on ULK-04A and 06A)
  • Pumps can be cleaned easily (parts can be disassembled easily).
  • Come with mechanism to stop flow of operating fluid to auxiliary pump.

Specifications

Model ULK-04A ULK-06A ULK-10A ULK-14A
Pumping speed(L/sec) 550 500 1200 1100 3400 3000 5400 4900
Ultimate pressure(Pa)*1 <2.6×10-5 <2.6×10-6 <2.6×10-5 <2.6×10-6 <2.6×10-5 <2.6×10-6 <2.6×10-5 <2.6×10-6
Maxium forepressure(Pa) 40 60 40 60 35 40 30 30
Heating up time(min) 9 8.5 16.5 15 20 20 25 25
Oil*4 ULVOIL D-11 ULVOIL D-31 ULVOIL D-11 ULVOIL D-31 ULVOIL D-11 ULVOIL D-31 ULVOIL D-11 ULVOIL D-31
Oil capacity(L) 0.15 0.35 0.8 1.5
Cooling water temperature(℃) 19℃~25℃
Water connections Rc 1/4" Rc 1/4" Rc 3/8" Rc 3/8"
Water capacity(L/min) 1 1 1 1.5 2.5 3 2.5 3.5
Voltage 200V/1Φ
Pump power(kW) 0.55 0.73 0.9 1.2 2 2.4 2.25 2.4
Heater type Plate Plate Plate Plate
Standard backing pump*2 VD151/VD201
PVD-180/PVD-360
VD30C/VD40C/VD60C VD90C
VS1501
PKS-016/PKS-030
VS1501/VS2401/PKS-030
Dimensions*3(mm) A 175 250 340 340
B 150 180 240 240
H 344 449 650 670
Inlet VG100 VG150 VG250 VG350
Outlet VG25 VG40 VG80 VG80
Weight(kg) 7.5 13.5 47 56
Oil level gage Without Without Slight glass Slight glass
Themal switch option With With With With
Themal switch operating temperature(℃) 250 250 180 180

*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
*4 D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.

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