Turbo Molecular Pump
- Free mounting
No limitation in the mounting direction The degree of freedom in system design is
high because of free mounting direction.
- On-board controller
Integrated controller is capable to reduce wire work and downsize pumping system.
- High compression ratio and high back pressure
High compression ratio made it possible to run the pump at high back pressure and downsize its
- Three kinds of flange
Inlet port flange is selectable from ISO-K, ICF, and VG.
- Clean vacuum environment
Less back flow of hydrocarbon gases while both the pump is running and stopping.
- Low noise
Noise level at the no load is 48dB or less（with ISO63-K flange）
- Main pumping system for analytical equipments, R&D systems, experimental devices, etc.
- Main pumping system for evaporators and sputtering systems, etc.
- Main pumping system to evacuate low molecule gases such as H2, He
|Pump||Cooing method||Natural air
|VG65, ICF114, ISO063-K||VG100, ICF152, ISO100-K|
|N2||70 L/s||280 L/s|
|He||60 L/s||270 L/s|
|H2||49 L/s||220 L/s|
|After baking||- *3||10-8Pa||- *3||10-8Pa|
|Max. compression rate||N2 :
>1×109, He : 4×107, H2 : 4×105
>1×109, He : 7×106, H2 : 1×105
*4, *5, *6
*4, *5, *7
|N2||15sccm *9||40sccm *9||10sccm *10||100sccm *10|
|Ar||-||10sccm *9||-||30sccm *10|
|-||15sccm *9||-||40sccm *10|
|Recommend backing pump
(when evacuating 10SCCM)
|Weight||VG：3.3kg, ISF：3.0kg, ISO：5.0kg||6.0kg / 9.0kg||6.3kg / 9.3kg|
|Start-up time（Up to 80%）
(DC24V. Back pressure:5Pa or less）
|1.7 min||3.5 min|
|Surface treatment *12||None|
|Mounting direction||Free direction|
|Controller||Input power source||DC24V ±5%, 120W||DC24V ±5%, 180W|
|Contact input and
|REMOTE(D-sub 15 pin male)
Digital input:4 points.Output:4 points.Analog output:1 point.
|Serial communication||RS-485(D-sub 15 pin male, shared with REMOTE)|
|Variable rotational frequency/ speed||Change of operation rotation speed number
is possible between 25% and 100% from
the pump spec by 0.1% step.
|Detecting alarm and warning.|
|Protection circuit||Indicating alarm and warning.|
|Standard accessories||Instruction Manual(CD-R), Protective net(Only VG and ICF,
ISO flange protective net is built in the gasket.),
Gasket(inlet flange), Dust cap(for inlet, outlet and connector)
|Applicable standard||CE, TUVus|
|*1||Please choose inlet flenge when ordering.|
|*2||Calculated by using 2 stage vacuum pump as a back pump.|
|*3||Baking is available only for forced air cooling type with ICF flange.|
|*4||Value at the time of the ambient air temperature is
25℃. If ambient air temperature changes, an acceptable value will change.
|*5||Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time.|
|*6||Maximum inlet port pressure which can accept continuous running.|
|*7||Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm.|
|*8||Value when ambient temperature is 5～25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm.|
|*9||The vakue measured by using 60L/min vacuum pump as back pump.|
|*10||The vakue measured by using 120L/min vacuum pump as back pump.|
|*11||Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases.|
|*12||Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases.|
|*13||This value is measured by ULVAC standard for ISO flange type.|
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