Turbo Molecular Pump

UTMーFH Series



The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.


  • There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.


  • Main evacuation of light ~middle processes such as evaporator, sputtering system, dry etching, etc where there are not any side reaction by-products.
  • Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.
  • Main evacuation for those equipment and system for light gas such as H2 and He.
  • Multiple turbo molecular pumps with centralized back pump configuration.


Wide range and high throughput models High back-pressure and high compression models Inlet flange size N2pumping speed(L/s) *1 *2
- UTM-6300FH VG500 6300
UTM-3301FW UTM-3303FH VG350 3300
UTM-2300FW - VG300 2730
VG250 2230
ICF305 2110
UTM-1400FW - VG250 1490
VG200 1360
ICF253 1300
UTM-1001FW UTM-1001FH VG200 1000
ICF253 1000
UTM-800FW UTM-800FH VG150 810
ICF203 740
UTM-480FW UTM-480FH VG150 480
ICF203 480
UTM-350FW UTM-350FH VG100 350
ICF152 330
*1 Value measured in accordance with JVIS005 standard, or calculated value based on it
*2 Protective mesh isn't used.


"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept