Turbo Molecular Pump

UTMーFH Series

UTM-FH

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The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings.
The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes.

Features

  • Built-in monitoring / self-diagnostic and communication functions enable to configure centralized monitoring system.
  • Applying coupling free system. Common power supply*1 can control all UTM-FW/FH series. *1 This function is only available for D3 version.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Free mounting direction
  • Enable to maintain stable pumping performance against the change of back pressure.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.
  • Realize the high durability and reliability by safety inspection such as rushing-in testing, touching down testing, forced destruction testing for rotor and foreign material(Si wafer) drop testing.

Applications

  • Main evacuation of light to middle process such as evaporator, sputtering system, dry etching, etc. where there are not any side reaction by-products.
  • Pumping system of analytical instrument, R&D system, laboratory equipment, etc.
  • Multiple turbo molecular pumps with centralized back pump configuration.

Specifications

Model   UTM-350FH UTM-480FH UTM-800FH UTM-1001FH UTM-3303FH
Flange size Inlet VG100 ICF152 VG150 ICF203 VG150 ICF203 VG200 ICF253 VG350
Outlet NW25 NW40
Pumping
speed*1*2
L/sec N2 350 330 480 480 810 740 1000 1000 3300
H2 320 310 340 340 530 520 570 570 2400
Ultimate pressure *1*3 Pa 10-8
Max compression
rate*1*3
N2 >1010 >109 >1011
H2 1 x 104 3 x 104 9 x 104
Max inlet
pressure of
N2*1*4
(at Max flow)
Pa Water
cooling
43 18 9
Air
cooling
8 0.7 -
Max outlet
pressure of
N2*1*4
(at Max flow)
Pa Water
cooling
410 180 210
Air
cooling
240 50 -
Max flow
rate of N2*4
SCCM Water
cooling
850 1100 1800
Air
cooling
480 260 -
Max flow
rate of Ar*4
SCCM Water
cooling
370 480 1100
Air
cooling
160 110 -
Rotation speed rpm 45000 36000 22200
Acceleration/
Deceleration time
min Approx. 4.0 / 4.0 Approx. 6.0 / 10.0 Approx. 12 / 16
Bearing type 5 axis magnetic levitation and digital control
Rotor blade
surface treatment
Ni plating NA
Baking
temperature
≦120
Cooling method Water cooling /Air cooling selectable Water cooling
only
Cooling water port Rc 3/8
Flow rate of
cooling water
L/min ≧3.0
Pressure drop
of cooling water
between inlet
and outlet
MPa ≧0.05
Gas purge port NW10 NA
Flow rate of gas purge SCCM 10 25 NA
Weight kg 17 28 86
Recommended
backing vacuum
pump*5
L/min 290 800 1500
Noise level dBA 64 65 55
Power consumption kVA 0.6 0.9 1.6
Input voltage ACV Single phase 200~240
Input frequency Hz 50 / 60
Motor drive system VVVF
Output frequency Hz 750 600 370
Ambient temperature 0~40
Weight kg 10.0
Conformity standard CE

Note)The value in the table are representative of actual measurement value and are not guaranteed.
*1 These are values measures according to the JVIS005, or calculated values based
  on these measured values.
*2 Without the protecting metal net.
*3 A digital number is expressed.
*4 These are values measured under the condition of standard of surface treatment,
 and measured with standard backing pump.When continuous long term operation near the
  maximum inlet port pressure will be maintained, please consult the manufacturer
 (JVIS005 standard term)
*5 Select a suitable, larger capacity pump depending on the gas flow rate.

Dimension drawing

UTM-FH_size_en1.png UTM-FH_size_en2.png
UTM-FH_size_en3.png UTM-FH_size_en4.png
UTM-FH_size_en5.png UTM-FH_size_en6.png
UTM-FH_size_en7.png

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