Turbo Molecular Pump

UTMーFW Series

UTM-FW

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The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings.
The UTM-FW series is wide range and high flow type for high load process and middle~hard processes.

Features

  • Built-in monitoring / self-diagnostic and communication functions enable to configure centralized monitoring system.
  • Applying coupling free system. Common power supply*1 can control all UTM-FW/FH series.
    *1 This function is only available for D3 version.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Free mounting direction
  • Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.
  • Realize the high durability and reliability by safety inspection such as rushing-in testing, touching down testing, forced destruction testing for rotor and foreign material(Si wafer) drop testing.

Applications

  • Main evacuation of middle to hard process such as dry etching, CVD system, etc.
  • High flow gas evacuation for dry etching, CVD system, sputtering system, etc.
  • Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.

Specifications

Model UTM-350FW UTM-480FW UTM-800FW UTM-1001FW
Flange size Inlet VG100 ICF152 VG150 ICF203 VG150 ICF203 VG200 ICF253
Outlet NW25 NW40
Pumping speed *1*2 L/sec 350 N2 330 N2 480 N2 480 N2 810 N2 740 N2 1000 N2 1000 N2
320 H2 310 H2 340 H2 340 H2 530 H2 520 H2 570 H2 570 H2
Ultimate
pressure *1*3
Pa 10-7
Max compression rate *1*3 >1010 N2 >109 N2
3 x 103 H2 4 x 103 H2
Max inlet
pressure of N2 *1*4
(at Max flow)
Water
cooling
76 Pa 38 Pa
Air
cooling
16 Pa 1.2 Pa
Max outlet
pressure of N2 *1*4
(at Max flow)
Water
cooling
440 Pa 290 Pa
Air
cooling
270 Pa 70 Pa
Max outlet
pressure of N2 *1*4
(at SCCM)
Water
cooling
650(at 100SCCM) 510(at 200SCCM)
Air
cooling
520(at 100SCCM) 290(at 200SCCM)
Max flow rate of N2 *4 Water
cooling
950 SCCM 1800 SCCM
Air
cooling
560 SCCM 370 SCCM
Max flow rate of Ar *4 Water
cooling
460 SCCM 700 SCCM
Air
cooling
210 SCCM 170 SCCM
Rotation speed rpm 45000 36000
Acceleration /
Deceleration time
min 約 4.0 / 4.0 約 6.0 / 10.0
Bearing type   5 axis magnetic levitation and digital control
Rotor blade surface
treatment
  Ni plating
Baking temperature ≦120
Cooling method   Water cooling /Air cooling selectable
Cooling water port   Rc 3/8
Flow rate of
cooling water
L/min ≧3.0
Pressure drop
of cooling water
between inlet
and outlet
MPa ≧0.05
Gas purge port   NW10
Flow rate of
gas purge
SCCM 10 25
Weight kg 17 28
Recommended
backing vacuum
pump *5
L/min 290 800
Noise level dBA 64 65
Power consumption kVA 0.6 0.9
Input voltage ACV Single phase 200~240
Input frequency Hz 50 / 60
Motor drive system   VVVF
Output frequency Hz 750 600
Ambient
temperature
0~40
Weight kg 10.0
Conformity standard CE

Model   UTM-1400FW UTM-2300FW UTM-3301FW
Flange size Inlet VG250 VG200 ICF253 VG300 VG250 ICF305 VG350
Outlet NW40
Pumping speed *1*2 L/sec 1490 N2 1360 N2 1300 N2 2730 N2 2230 N2 2110 N2 3300 N2
890 H2 860 H2 860 H2 1850 H2 1720 H2 1700 H2 2400 H2
Ultimate
pressure *1*3
Pa 10-8 10-7
Max compression rate *1*3 >109 N2 >108 N2
6 x 103 H2 9 x 103 H2 8 x 103 H2
Max inlet
pressure of N2 *1*4
(at Max flow)
Water
cooling
13 Pa 7 Pa 8 Pa
Air
cooling
-
Max outlet
pressure of N2 *1*4
(at Max flow)
Water
cooling
240 Pa 180 Pa
Air
cooling
-
Max outlet
pressure of N2 *1*4
(at SCCM)
Water
cooling
-
Air
cooling
-
Max flow rate of N2 *4 Water
cooling
1400 SCCM 1500 SCCM
Air
cooling
-
Max flow rate of Ar *4 Water
cooling
1000 SCCM 1350 SCCM 1300 SCCM
Air
cooling
-
Rotation speed rpm 32100 24600 21600
Acceleration /
Deceleration time
min 約 7.0 / 7.0 約 9.0 / 9.0 約 12.0 / 16.0
Bearing type   5 axis magnetic levitation and digital control
Rotor blade surface
treatment
  Ni plating
Baking temperature ≦120
Cooling method   Water cooling only
Cooling water port   Rc 3/8
Flow rate of
cooling water
L/min ≧3.0
Pressure drop
of cooling water
between inlet
and outlet
MPa ≧0.05
Gas purge port   NW10
Flow rate of
gas purge
SCCM 25 50
Weight kg 36 60 90
Recommended
backing vacuum
pump *5
L/min 800 1500
Noise level dBA 63 62 58
Power consumption kVA 1.2 1.3 2.0
Input voltage ACV Single phase 200~240
Input frequency Hz 50 / 60
Motor drive system   VVVF
Output frequency Hz 535 410 360
Ambient temperature 0~40
Weight kg 10.0
Conformity standard CE

Note) The value in the table are representative of actual measurement value and are not guaranteed
*1 These are values measures according to the JVIS005, or calculated values based
  on these measured values.
*2 Without the protecting metal net.
*3 A digital number is expressed.
*4 These are values measured under the condition of standard of surface treatment,
 and measured with standard backing pump.
  When continuous long term operation near the maximum inlet port pressure will be maintained,
  please consult the manufacturer(JVIS005 standard term)
*5 Select a suitable, larger capacity pump depending on the gas flow rate.

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