Turbo Molecular Pump

UTM-MI Series

UTM-MI

アルバック

Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

Features

  • Controller integrated with the pump body
    No wiring work between pump body and controller.
  • Free mounting direction
    Free mounting direction makes the system design flexible.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100%
    Enabling the pressure adjustment in a chamber by changing the rotation speed.
  • High durability and safety
    Safety confirmation tests are passed, such as air rushing-in test and touch down test.

Applications

  • Main vacuum pumping system for equipment
    - Semiconductor equipmen
    - Evaporator,Sputtering syste
    - Analytical equipment,Experimental device and etc.
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • Replacement from oil diffusion pumps
  • General use for high vacuum evacuation system.

Specifications

Model UTM1200A UTM1600A UTM2300A UTM3400A
Inlet port VG
150
ISO
160F
VG
200
VG
250
ISO
200F
ISO
250F
VG
250
ISO
250F
VG
300
VG
350
ISO
320F
Outlet port KF40
Ultimate pressure
*1
10-7 Pa
Pumping
speed
*2*3
N2 1030 L/s 1400 L/s 2100 L/s 3200 L/s
Ar 980 L/s 1330 L/s 2000 L/s 3100 L/s
H2 660 L/s 750 L/s 1380 L/s 2100 L/s
Comp
ression
rate
N2 2×108 ≧ 1×108 ≧ 1×109
He 7×103 5×103 1×105
H2 8×102 9×102 6×103
Max inlet
pressure *4
26 Pa 4.5 Pa 7 Pa
Max outlet
pressure *4
266 Pa 200 Pa 270 Pa
Rotation speed 37200 min-1 33700 min-1 27600 min-1
Speed variation Speed is variable between 25% and 100% of the rated speed.( set as 0.1%)
Start-up time ≦ 8minutes ≦ 9minutes ≦ 16minutes
Mounting
position
In any desired direction
Surface
treatment *5
None
Commun
ication
Contact D-sub 25 pin female Contact input and output signal D-sub 37 pin female Contact input and output signal
Serial Serial connecter RS232C/RS485 D-sub 9 pin male RS232C/RS485
Controller Compo
sition
Pump with integrated controller
Input
electric
power
Single phase AC200 〜240V ±10%( 50/60Hz ±2Hz)
Max
power
0.75kVA 1.2kVA
Cooling method Water cooled
Cooling
water *6
Flow
rate
3~4 L/min
Pressure 0.2 ~ 0.4M PaG
Noise 57 dB(A) 60 dB(A)
Weight 43 kg 41 kg 56 kg 94 kg
Recommended
backing pump *7
≧ 600L/min ≧ 1500L/min
Applicable standard CE、TUVus
Standard accessories O-ring(Only VG)、Dust cap(Outlet port)、Remote-control Connector、Instruction manual(CD-ROM) 
Select
parts
AC Cable AC Conector / AC Cable(5m/10m/15m/20m)
Special
bolt for
fixing
pump
M10/ M12
Special bolt for
fixing pump
Need(M10) *8 Not Need *8
Option Gas purge adaptor (KF10)

*1 digit number is expressed.
*2 Without a protective net.
*3 Calculated values : UTM2300A and UTM3400A 
*4 Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5 Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6 Not condensing 
*7 When evacuating 30SCCM 
*8 Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact
  us for the detailed information.

Dimension drawing

UTM-MI_size.png

  • Dimensions

(mm)

A B C D E
UTM1200A VG150 235 439 218 - 285
ISO160F 225 442 218 - 285
UTM1600A VG200 300 374 218 - 285
ISO200F 285 374 218 - 285
VG250 350 374 218 - 285
ISO250F 335 374 218 - 285
UTM2300A VG250 350 376 233 245 310
ISO250F 335 376 233 245 310
UTM3400A VG300 400 462 233 245 360
VG350 450 462 233 245 360
ISO320F 425 467 233 245 360

Note)The position and phase of outlet, gas purge port,
   cooling water valve and cooling water valve connector are different to types.
   Please contact us for the details information.

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