Basic Process

Qulee BGM2 Series



"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)


  • Excellent in Cost Performance
    Suitable for RGA application
  • Communication interface
    Ethernet compatible
  • Integrated Display
    No need for PC
  • Simple Operation
    "One Click" function
  • Bake Out
    Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance help function
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard
    Conforms with CE


  • Residual gas analysis for organic electro luminescence
  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development


Resolution M/△M=1M(10% P.H.)

Model BGM2-101 BGM2-201 BGM2-102 BGM2-202
Mass filter type Quadrupole
Mass range 1~100 amu 1~200 amu 1~100 amu 1~200 amu
Detector type Faraday cup EM tube
Faraday cup
Sensitivity 10-7A/Pa 4A/Pa
Minimum detectable partial pressure 10-8Pa 10-12Pa
Maximum operating pressure 1x10-2Pa
Total pressure function Capable/10-2 ~ 10-5Pa
One Click function Capable /He/H2O/N2/O2/Any gas
One Click leak test function Capable
Power input DC24V±10% 50W
Maximum sensor operating temperature 120℃ (248?)
Maximum bakeout temperature (electronics removed) 250℃ (482?)
Operating temperature range 10 to 40℃ (50 to 104?)
Software Qulee QCS Ver.4.0 later (Windows 7/8/10)
Applicable standard CE

該非判定結果報告書 Download

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