Basic Process
Qulee with YTP-H Series
Qulee with YTP-H BGM2-202
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By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
Features
- Excellent Cost Performance
Provides gas analysis with an optional differentialpumping unit - Compact Design
Utilizes standard vacuum unit model desktop YTP - Integrated Display Unit Design
Provides visual data without need for a PC - Easy to Operate
One-click function for easy operation, no complex procedures - Atmospheric Pressure Analysis
Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
(22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar) - Select a Model Depending on your Application
Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302) - Low noise
43dB(A) or less at Ultimate pressure - Pressure indication
Designed for easy integration of 2 vacuum gauges - Complete Leak Test Function
Helium leak test, air leak test, leak up test - Qulee QCS Ver.4 (Ethernet compatible)
Software included (Windows 7/8/10)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
Residual gas analysis in PVD system - Residual gas analysis for high vacuum pumping equipment, etc.
Specifications
| Qulee main body | Select from BGM2-101 / 102 / 201 / 202, HGM2-302 ＊Refer to the product catalogue for the specification of Qulee |
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| Software Qulee QCS Ver.4.0(Windows 7 / 8 / 10) | ||||
| Max sampling pressure | Select from atmospheric pressure 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa | |||
| Select from atmospheric pressure 22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr | ||||
| Select from atmospheric pressure 30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar | ||||
| ＊Atmospheric pressure type can be used only under the atomospheric condition ＊3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure |
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| Specification pressure | Vacuum type | Gas introduction type (3000Pa ～1Pa type) |
Manual bellows valve (2 systems: orifice line / direct line) Mating flange / ICF070 |
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| Variable leak valve type | Sampling pressure | Power-supply voltage | AC100-240V | |
| Atmospheric pressure type (Atmospheric pressure sampling unit) APS-001 |
Capillary type (100,000Pa type) | Dry pump(Sweep) | ６L/min, Ultimate pressure/6700Pa | |
| Controller unit | Temperature contol and On/Off control of cartridge heater, On/Off control of sweep pump | |||
| Capillary tube unit | Manual bellows valve (1 line), Cartridge heater, insulation mat, Capillary tube (already mounted), Joint fitting 1/4 ”Swagelok | |||
| Power-supply voltage | Select for AC100V/220V | |||
| Pump unit desktop YTP | Desktop YTP (YTP70A-D) |
Turbo molecular pump | 70L/s (N2) | |
| Dry pump(Roughing) | 19L/min(Diaphragm pump) | |||
| Power-supply voltage | AC100-240V | |||
| Accessories | AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Software installation disc, Bolt set for fixing flange, Gasket (UFC114G,UFC070G), Power strip(*3), Casters(*4), Various fixing screws | |||
| Options | Ionization gauge package(SH2-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(8 ports or 16 ports)(*5),Floor cart(*6) | |||
＊1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V. Three power codes are necessary for atomospheric pressure sampling unit, desktop YTP, and AC adapter for Qulee.
＊2 Make sure to use a base stage when installing desktop YTP. For atmospheric pressure type, it has two-stage structure so that a control unit can be attached.
＊3 Power strip only comes with atmosperic pressure/AC100V type.
＊4 Casters only come with atmospheric pressure type. Please attatch casters by yourself.
＊5 AC adapter is necessary for an optional switching hub.
＊6 Please set up the floor cart by yourself.
＊7 Desktop YTP, Qulee main body, gas inlet, and other parts will be packaged separately. Please refer to the assembly manual for set up.
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