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High Performance Process
Qulee HGM2 Series
HGM2-302
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ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)
Features
- Most Appropriate for R&D Applications
Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar） - Communication interface Ethernet compatible
- Integrated Display No need for PC
- Simple Operation "One Click" function
- Bake Out
Max 250℃ (482°F) high temperature bake (300℃ (572°F) when the sensors are removed) - Degas Function Electron bombard degas
- Maintenance
Filament, ion source, and secondary electron multiplier are easy to replace - Protection and Maintenance Features
Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031) - Various Leak Tests are Available
Helium leak test, air leak test, leak up - Total Pressure Measurement
Capable of total pressure measurement (ionization gauge) - Qulee QCS is Included
This software is included and compatible with (Windows 8/10/11) - Applicable Standard Conforms with CE
Applications
- R&D such as thermal desorption gas analysis
- Residual gas analysis for ultra-high vacuum pumping equipment, etc
- Trace impurities in gas
- R&D for photovoltaic field
- Analysis of organic compound
- Environmental measurements
Specifications
| Model | HGM2-202 | HGM2-302 | ||
| Mass filter type | Quadrupole | |||
| Mass range | 1 ~ 200 amu | 1 ~ 300 amu | ||
| Resolution | M/ ΔM=1M(10% P.H.) | |||
| Detector type | Faraday cup | SEM | Faraday cup | SEM |
| Sensitivity | 2.5×10-6 A/Pa @1.0A/Pa | 4 A/Pa | 2.0×10-6 A/Pa @1.0A/Pa | 4 A/Pa |
| 3.3×10-4 A/Torr | 533 A/Torr | 3.3×10-4 A/Torr | 533 A/Torr | |
| 2.5×10-4 A/mbar | 400 A/mbar | 2.5×10-4 A/mbar | 400 A/mbar | |
| Minimum datectable partial pressure | Approx. 10-9Pa | Approx. 10-13Pa | Approx. 10-9Pa | Approx. 10-13Pa |
| Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | |
| Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | |
| Maximum operating pressure | 1×10-2Pa | |||
| 7.5×10-3 Torr | ||||
| 1×10-4 mbar | ||||
| Filament | lr / Y2O3 , 2pcs | |||
| Ionizing voltage | 25 ~ 70 eV(defalut:70eV) | |||
| Emission current | 0.1mA/0.5mA/1.0mA(default:0.5mA) | |||
| DEGAS | Electron bombard type 330V, 5mA | |||
| Total pressure function | Capable / 10-2 ~ 10-5Pa | |||
| "One Click" function | Capable / He / H2O / N2 / O2 / Any gas | |||
| "One Click" leak test function | Capable | |||
| Power input | DC24V±10% 50W | |||
| Weight(sensor unit / sensor) | 2.4kg/0.81kg | |||
| Maximum sensor operating temperature | 250℃(482°F) | |||
| Maximum bakeout temperature (elsectronisc removed) |
300℃(572°F) | |||
| Operating temperature range | 10 to 40℃(50 to 104°F) | |||
| Operating humigity range | 15 ~ 80%(not condensing) | |||
| IP rating | IP30(sensor unit) | |||
| Power connector | MSTBV2.5/3-STF-5.08 | |||
| Communication interface | Ethernet compatible | |||
| External input / output connector | D-sub15-pin (M2.6 screw)(eith option) | |||
| Communication connector | RJ45 | |||
| External input / output signal | Analog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |||
| Software | Qulee QCS Ver. 4.2 later (Windows 8/10/11) | |||
| Standard accessories | Power connector, LAN cable (3m long),Software (install CD),Instruction manual (CD) | |||
| Option accessories (cf. Qulee optional catalogue) |
LAN cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case | |||
| Applicable standard | CE | |||
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.
