Print/Download
High Pressure Process
Qulee CGM2 Series
CGM2-052
アルバック
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
Features
- Ideal for process monitoring of various sputtering sysytem
- No differential pumping system required (at 1Pa (7.5×10-3 Torr / 1×10-2 mbar) lower)
- Integrated Display: No need for PC
- Simple Operation: "One Click" function
- Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed)
- Electron bombard degas
- Ion source and secondary electron multiplier protection maintenance help function
- Traceability of analysis tube (patent pending)
- Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
- Capable of total pressure measurement (ionization gauge)
- Qulee QCS is Included:
This software is included and compatible with (Windows 8/10) - QIP (Quick Install Package system) is Included:
Auto measuring package (refer to options catalog for details) - Conforms with CE
Applications
- Process monitoring for PV, FPD, and semiconductor system
- Residual gas analysis in PVD system
- Impurities (H2O, etc.) control in PVD system
- For leak testing
Specifications
| Model | CGM2-051 | CGM2-052 |
| Mass filter type | Quadrupole | |
| Mass range | 1 to 50 amu | |
| Resolution | M/ΔM=1M (10% P.H.) | |
| Detector type | Faraday cup (FC) | EM Tube (SEM) / Faraday cup (FC) |
| Sensitivity | 10?? A/Pa | SEM:10?? A/Pa |
| 1.33×10?? A/Torr | SEM:1.33×10?? A/Torr | |
| 10?? A/mbar | SEM:10?? A/mbar | |
| Minimum detectable partial pressure | 1×10?? Pa | SEM:1×10-10 Pa |
| 7.5×10-10 Torr | SEM:7.5×10-13 Torr | |
| 1×10?? mbar | SEM:1×10-12 mbar | |
| Maximum operating pressure | FC:2 Pa |
FC:2, SEM:1×10?? Pa |
| FC:1.5×10?? Torr | FC:1.5×10?? SEM:7.5×10?? Torr | |
| FC:2×10?? mbar | FC:2×10?? SEM:1×10?? mbar | |
| Linearity | 1Pa | |
| 7.5×10?? Torr | ||
| 1×10?? mbar | ||
| Filament | lr/Y?O? | |
| Ionzing voltage | 40eV | |
| Emission current | 0.1mA/0.4mA | |
| Degas | Electron bombard type 300V,5mA | |
| Total pressure function | Capable | |
| One Click function | Capable/He/H?O/N?/O?/Any gas | |
| One Click leak test function | Capable | |
| Power input | DC24V ±10% 50W | |
| Weight(Sensor unit/sensor) | 2.1kg/0.44kg | 2.2kg/0.44kg |
| Maximum sensor operating temperature | 120℃(248?) | |
|
Maximum bakeout temperature (electronics removed) |
250℃(482?) | |
| Operating temperature range | 10 to 40℃ (50 to 104?) | |
| Operating humidity range | 15 to 80% (not condensing) | |
| IP rating | IP30 (sensor unit) | |
| Power connector | MSTB2.5/3-STF-5.08 | |
| Communication interface | RS232C/RS485 (with option) | |
| External input/output connector | D-sub15-pin (M2.6 screw) | |
| Communication connector | RJ-45 | |
| External input/output signal | Analog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |
| Software | Qulee QCS Ver. 4.0 later (Windows 8/10) | |
| Standard accessories | Power connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper) | |
|
Optional accessories (Cf. Qulee optional catalogue) |
QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case | |
| Applicable standard | CE | |
※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.
該非判定結果報告書 Download
SDS Download
Accessories and Consumables
Inquiry about this product
