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Sputtering Process
Qulee CGM2 Series
CGM2-051 / 052
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"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
Features
- Ideal for process monitoring of various sputtering sysytem
- Monitoring the Air Leak
- Management of residual moisture
- No differential pumping system required (less than 1 Pa at 7.5 x 10-3 Torr/1 x 10-2 mbar)
- Built-in display: PC-free
- Highly sensitive leak test possible (CGM2-052).More leak testing.
- Various leak tests available (Helium leak test, air leak test, assembly test)
- Total pressure measurement (ionization gauge) possible
- Includes a Quick Install Package system (QIP). Automatic measurement package (see option catalog for details)
- Qulee QCS is Included : This software is included and compatible with (Windows 8/10/11)
- Conforms with CE
Applications
- Process monitoring for PV, FPD, and semiconductor system
- Residual gas analysis in PVD system
- Impurities (H2O, etc.) control in PVD system
- For leak testing
Specifications
| Model | CGM2-051 | CGM2-052 | CGM2-101 | CGM2-102 |
| Mass filter type | Quadrupole | |||
| Mass range | 1 to 50 amu | 1 to 100 amu | ||
| Resolution | M/ΔM=1M (10% P.H.) | |||
| Detector type | Faraday cup (FC) | EM Tube (SEM) / Faraday cup (FC) |
Faraday cup (FC) | EM Tube (SEM) / Faraday cup (FC) |
| Sensitivity | 0.1uA/Pa | SEM: 0.1mA/Pa | 0.1uA/Pa | SEM: 0.1mA/Pa |
| 13.3 uA/Torr | SEM: 13.3 mA/Torr | 13.3 uA/Torr | SEM: 13.3 mA/Torr | |
| 10 uA/mbar | SEM: 10 mA/mbar | 10 uA/mbar | SEM: 10 mA/mbar | |
| Minimum detectable partial pressure |
1×10-7 Pa | SEM: 1×10-10 Pa | 1×10-7 Pa | SEM: 1×10-10 Pa |
| 7.5×10-10 Torr | SEM: 7.5×10-13 Torr | 7.5×10-10 Torr | SEM: 7.5×10-13 Torr | |
| 1×10-9 mbar | SEM: 1×10-12 mbar | 1×10-9 mbar | SEM: 1×10-12 mbar | |
| Maximum operating pressure |
FC: 2 Pa | FC: 2Pa, SEM: 1×10-２Pa |
FC: 2 Pa | FC: 2 Pa, SEM: 1×10-２Pa |
| FC: 1.5×10-2 Torr | FC: 1.5×10-2 SEM: 7.5×10-5 Torr |
FC: 1.5×10-2 Torr | FC: 1.5×10-2 SEM: 7.5×10-5 Torr |
|
| FC: 2×10-2 mbar | FC: 2×10-2 SEM: 1×10-4 mbar |
FC: 2×10-2 mbar | FC: 2×10-2 SEM: 1×10-4 mbar |
|
| Linearity | 1Pa | |||
| 7.5×10-3 Torr | ||||
| 1×10-2 mbar | ||||
| Total pressure function | Capable | |||
| Degas function | Electron bombard type 300V, 5mA | |||
| One Click function | Capable / He / H2O / N2 / O2 / Any gas | |||
| One Click leak test function | Capable | |||
| Power input | DC24V ±10% 50W | |||
| Maximum sensor operating temperature |
120℃ (248℉) | |||
| Maximum sensor operating temperature |
250℃ (482℉) | |||
| Operating temperature range |
10 to 40℃ (50 to 104F) | |||
| Operating humidity range |
15 to 80 % (not condensing) | |||
| Communication interface | Ethernet | |||
| Software | Qulee QCS Ver. 4.2 later (Windows 8/10/11) | |||
| Applicable standard | CE | |||
