RF Power Supply / Matching box
MBX-N Series
MBX-1310N
アルバック
This is a matching box for the RFS series.
Specifications
[Matching box]
| Model | MBX-1305N | MBX-1310N | MBX-1330N | MBX-1350 | |
| RF input | Input frequency | 13.56MHz | |||
| Rated power | 30 to 500W | 30 to 1000W | 30 to 3000W | 50 to 5000W | |
| Input connector | N type | HN type | DIN 7/16 type | ||
| RF output | Allowable output voltage | 2.5kVpp or less / 2.5kVdc or less | 5.0kVpp or less / 2.5kVdc or less | 10kVpp or less / 2.5kVdc or less | |
| Allowable output current | 30A or less | 80A or less | 120A or less | ||
| Load impedance | Real part： 0.5Ω ≦ R ≦ 10.0Ω (Only the range of regulation voltage and current) |
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| Residual reflected wave power | Big either input travelling wave power 0.3% or less or 10W or less | Big either input travelling wave power 0.3% or less or 30W or less | Big either input travelling wave power 0.3% or less or 50W or less | ||
| Cooling system | Air-cooling | Air-cooling + Water-cooling （Flow rate 2L/min） | |||
| Demensions W x D x H | 375mm x 250mm x 120mm(excepting projection portion) | 375mm x 250mm x 170mm (excepting projection portion) |
450mm x 500mm x 248mm (excepting projection portion) |
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| Weight | Approx. 8kg | Approx. 10kg | Approx. 21kg | ||
* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas
