Film Forming Equipment Optional Parts Electrode partition
ULVAC
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Features
Form changes with electrode structure.
Specification
Device external system
| Name | Applications |
| Bell jar cover | Handles for Glass bell jar / Splash prevention for glass. |
| Bell jar holder | Handles for Glass bell jar. |
| Glass bell jar cover | Glass containers for thin film preparation. |
| Metal bell jar (with water cooling tube) | Overheating prevention for the interior of a bell jar. (an elevating device is required separately) |
| Elevating device | For bell jar elevation. (a bell jar cover is required separately) |
| 16 ports feedthrough collar | Extension for introduction ports. |
| Control rack | Storage for control equipment. |
| Side panel for control rack | For safety regulation. |
| Back panel for control rack | For safety regulation. |
※Tabletop Vacuum Coater is only compatible with bell jar covers and glass bell jars.
※Form changes with electrode structure
■Prevention from thin film adhesion to a bell jar cover inside.
