Electrode partition|Other|Film Forming Equipment Optional Parts|Small Film Forming Equipment|Products|ULVAC SHOWCASE

Film Forming Equipment Optional Parts

Other

Electrode partition

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For prevention of contamination.



Features

Form changes with electrode structure.

Specification

Device external system

Name Applications
Bell jar cover Handles for Glass bell jar / Splash prevention for glass.
Bell jar holder Handles for Glass bell jar.
Glass bell jar cover Glass containers for thin film preparation.
Metal bell jar (with water cooling tube) Overheating prevention for the interior of a bell jar. (an elevating device is required separately)
Elevating device For bell jar elevation. (a bell jar cover is required separately)
16 ports feedthrough collar Extension for introduction ports.
Control rack Storage for control equipment.
Side panel for control rack For safety regulation.
Back panel for control rack For safety regulation.

Tabletop Vacuum Coater is only compatible with bell jar covers and glass bell jars.

zu_partition_for_depox.gif

※Form changes with electrode structure
■Prevention from thin film adhesion to a bell jar cover inside.

該非判定結果報告書 Download

SDS Download

EU
ULGR-X
USA
ULGR-X

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