Film Forming Equipment Optional Parts PSE Series
ULVAC
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Specification
PSE-150C
| Voltage | AC １00V Single phase 0.8kVA（50/60Hz）range of allowable voltage ＝±10％ |
| Load current | Max. 80A |
| Control signal | External automatic control input DC 0? 10V/ 0?100% setting inbound impeda 1MΩ |
| Control method | Thyristor AC phase control method (Precision of output stability : ±10%, Power variation : ±2%) |
| Rating | 30 min |
| External dimension | 480mm（W）×360mm（D）×149mm（H）（Without projection parts and accessories） |
| Weight | About 24 kg |
Option
| Specification code | PSE- 15C11111 |
PSE- 15C21111 |
PSE- 15C31111 |
PSE- 15C12211 |
PSE- 15C22211 |
PSE- 15C32211 |
| Switching function of output position | Single-point switching | Two-point switching | Three-point switching | Single-point switching | Two-point switching | Three-point switching |
| Switching function of low electric tap | Option | Option | Option | Loading | Loading | Loading |
| Automatic control by deposition controller | Option | Option | Option | Loading | Loading | Loading |
| Automatic control by temperature indicator controller | Option | Option | Option | Option | Option | Option |
| Output remote control | Option | Option | Option | Option | Option | Option |
