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Small Evaporation System
Small Evaporation Series
VTS-350M/ERH
アルバック機工
Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electrical systems in stands.
Four different types of exhaust system components are provided in the DEPOX series.
Ideal for experiments, such as basic research and development requiring easy handling.
Features
- Easy viewable through glass belljar and easy maintenance.
- The vacuum chamber can be opened without stopping the main pump.
- Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation (a maximum of four layers) are possible.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
| Model | VTS-350M/ERH | |
| Specification | Ultimate pressure | 4.0×10-４Pa 2.0×10-４Pa（with LN cold trap）※１ |
| Evacuation time | 4.0×10-３Pa/10min 3.0×10-３Pa/10min（with LN cold trap）※１ |
|
| Vacuum chamber | Vacuum chamber | Glass bell jar （dia.300mm × 300mm(H))) |
| Feedthrough collar | 12 ports (side 8 / bottom 4) | |
| Recommended substrate size (Maximum substrate size)※２ | □50mm ・ □140mm（Max） | |
| Power supply system | Evaporation electrode structure | 1 point |
| Evaporation Electrode / power supply | SEREM “PSE-150C” 1 set 0～10V 150A（Max) |
|
| Exhaust system | Main pump | Turbo molecular pump （345L/sec) |
| Liquid Nitrogen trap | Option | |
| Sub pump | Scroll pump （250L/min） | |
| Oil mist trap | ー | |
| Operation system | Main valve | Butterfly valve |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| Control system | Pirani vacuum gauge | GP-1G |
| Ionization vacuum gauge | GI-M2 | |
| Setup | Extreial dimensions Body | 730mm（W）×584mm（D）×1161mm（H） |
| Power supply | 480mm（W）×435.3mm（D）×149mm（H） | |
| Weight Body | 160kｇ | |
| Power supply | 40kg | |
※1：Liquid Nitrogen trapはOptionです。
※2： The values of the maximum board size are shown when film thickness distributions are not taken into account.
Utility
| Model | VTS-350M/ERH | |
| Power required | Body | 100V Single phase 50/60Hz 0.9kVA |
| Power supply | 200V Single phase 50/60Hz 1.5kVA | |
| Ground terminal | D grade (ground resistance/100Ω or less) | |
| Connection | Body 1Φ 100V | Cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
| Power supply 1Φ 200V | Cabtyre cable (with R2.0-5 ring tongue terminals) 2m | |
Dimension drawing
VTS-350M/ERH
Evaporation Electrode SEREM
Feedthrough Collar
Basic composition
※We customize according to the purpose of research and development.
