Small Evaporation System Model: VPC-061A
ULVAC
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This compact vacuum evaporation system is a resistance heating type and low cost type, in which the necessary equipment such as Main pump, Sub pump, valve piping, electric system, pressure measurement port, etc. are compactly stored in a pipe frame.
Ideal for experiments such as basic research and development of small substrate size.
Features
- Desktop type and compact size enable setup with space saving.
- The glass bell jar makes it easy to see the inside and has good control.
- It is possible to open the vacuum chamber without stopping the main pump.
- In the event of a power failure, the main pump is protected by the automatic leak valve.
Specification
| Model | VPC-061A | |
| Vacuum performance | Ultimate pressure | 1.3×10-３Pa 6.6×10-４Pa（with LN cold trap） |
| Evacuation time | 4.0×10-３Pa/20min 1.3×10-３Pa/20min（with LN cold trap） |
|
| Vacuum chamber | Vacuum chamber | Glass belljar (dia.150mm × 200mm(H)) |
| Feedthrough collar | 3 ports (side 3) | |
| Recommended substrate size (Maximum substrate size) ※1 | □25mm ・ □50mm（Max） | |
| Power supply system | Evaporation electrode structure | 1 point |
| Evaporation Electrode /power supply | SEREM PSE-150C・1 式 0 - 10V 150A（Max) |
|
| Exhaust system | Main pump | Oil diffusion pump（Air cooling） 50L/sec |
| Liquid Nitrogen trap | Equipped | |
| Backing pump | Oil rotary pump 20L/min | |
| Oil mist trap | Option | |
| Operation system | Main valve | Clapper valve |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| Control system | Pirani vacuum gauge | Option |
| Ionization vacuum gauge | Option | |
| Setup | External dimensions (Body) | 434mm(W)×422mm(D)×673mm(H) |
| Power supply | 480mm(W)×435.3mm(D)×149mm(H) | |
| Weight Body | 32kg | |
| Power supply | 40kg | |
※1：The values of the maximum board size are shown when film thickness distributions are not taken into account.
Utility
| Model | VPC-061 | |
| Power required | Body | 100V Single phase 50/60Hz 0.63kVA |
| Power supply | 200V Single phase 50/60Hz 1.5kVA | |
| Ground terminal | D grade (ground resistance / 100Ω or less) | |
| Connection | Body 1Φ 100V | Cabtyre cable (with plug) 2m |
| Power supply 1Φ 200V | Cabtyre cable (with R2.0-5 ring tongue terminals) 2m | |
Dimension drawing
Evaporation Electrode SEREM
Feedthrough Collar
Basic composition
