VPC-061|VPC Series|Small Evaporation System|Small Film Forming Equipment|Products|ULVAC SHOWCASE

Small Evaporation System

VPC Series

VPC-061

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This compact vacuum evaporation system is a resistance heating type and low cost type, in which the necessary equipment such as Main pump, Sub pump, valve piping, electric system, pressure measurement port, etc. are compactly stored in a pipe frame.
Ideal for experiments such as basic research and development of small substrate size.

Features

  • Desktop type and compact size enable setup with space saving.
  • The glass bell jar makes it easy to see the inside and has good control.
  • It is possible to open the vacuum chamber without stopping the main pump.

Specification

Model VPC-061
Vacuum performance Ultimate pressure 1.3×10-3Pa
6.6×10-4Pa(with LN cold trap)
Evacuation time 4.0×10-3Pa/20min
1.3×10-3Pa/20min(with LN cold trap)
Vacuum chamber Vacuum chamber Glass belljar (dia.150mm × 200mm(H))
Feedthrough collar 3 ports (side 3)
Recommended substrate size (Maximum substrate size) ※1 □25mm ・ □50mm(Max)
Power supply system Evaporation electrode structure 1 point
Evaporation Electrode /power supply SEREM PSE-150C・1 式
0~10V 150A(Max)
Exhaust system Main pump Oil diffusion pump(Air cooling) 50L/sec
Liquid Nitrogen trap Equipped
Backing pump Oil rotary pump 20L/min
Oil mist trap Option
Operation system Main valve Clapper valve
Sub valve Three way valve
Automatic leak valve
Control Manual control
Control system Pirani vacuum gauge Option
Ionization vacuum gauge Option
Setup External dimensions (Body) 434mm(W)×422mm(D)×673mm(H)
      Power supply 480mm(W)×435.3mm(D)×149mm(H)
Weight    Body 28kg
      Power supply 40kg

※1:The values of the maximum board size are shown when film thickness distributions are not taken into account.

Utility

Model VPC-061
Power required body 100V Single phase 50/60Hz 0.63kVA
Power supply 200V Single phase 50/60Hz 1.5kVA
Ground terminal D grade (ground resistance / 100Ω or less)
Connection Body 1Φ 100V Cabtyre cable (with plug) 2m
Power supply 1Φ 200V Cabtyre cable (with R2.0-5 ring tongue terminals) 2m

Dimension drawing

zu_vpc061.gif

Evaporation Electrode  SEREM

ph_pse150c.jpg

zu_psc150c.gif

Feedthrough Collar

Basic composition

zu_vpc060_060a_fc.gif

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