Small Evaporation System
VPC Series
VPC-1100
アルバック
It is a high-speed type vacuum deposition system by the resistance heating formula which stored compactly required apparatus, such as an oil diffusion pump, an oil rotary vacuum pump, Pirani gauge, valve piping, an electric system, and a pressure measurement port, in the mount, and has equipped belljar rise-and-fall equipment etc.
It is ideal for an experiment, such as basic research development of large substrate size.
Features
- Easy viewable through glass belljar and easy maintenance.
- The vacuum chamber can be opened without stopping the main pump.
- Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation (a maximum of four layers) are possible.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
| Model | VPC-1100 | |
| Specification | Ultimate pressure | 4.0×10-４Pa 1.3×10-４Pa（with LN cold trap） |
| Evacuation time | 4.0×10-３Pa/10min 10-４Pa台/10min（with LN cold trap） |
|
| Vacuum chamber | Vacuum chamber | Glass bell jar （dia.390mm × 350mm(H)) |
| Feedthrough collar | 20 ports (side 14 / bottom 6) | |
| Recommended substrate size (Maximum substrate size) ※1 | □50mm ・ □220mm（Max） | |
| Power supply system | Evaporation electrode structure | 3 point |
| Evaporation Electrode / power supply | SEREM “PSE-150C” 1 set 0～10V 150A（Max) |
|
| Exhaust system | Main pump※2 | Oil diffusion pump（Water cooling） 1100L/sec |
| Liquid Nitrogen trap | Option | |
| Sub pump | Oil rotary pump200L/min、2 pumps | |
| Oil mist trap | Option | |
| Operation system | Main valve | Butterfly valve |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| Control system | Pirani vacuum gauge | GP-1G |
| Ionization vacuum gauge | Option | |
| Setup | Extreial dimensions Body | 1235mm（W）×836mm（D）×2155mm（H） |
| Power supply | Equipped | |
| Weight Body | 313kｇ | |
| Power supply | Equipped | |
※1：The values of the maximum board size are shown when film thickness distributions are not taken into account.
※2：The specifications can be arranged for a turbo-molecular pump (TMP).
Utility
| Model | VPC-1100 | |
| Power required | Body | 200V Three phase 50/60Hz 5.0kVA |
| Power supply | 100V Single phase 50/60Hz 1.0kVA | |
| Ground terminal | D grade (ground resistance/100Ω or less) | |
| Connection | Body 3Φ 200V | Cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
| Power supply 1Φ 100V | Vinyl cabtyre cable (with plug) 4m | |
| Water requirement | 1.5 L／min （Water temperature : 20?25 degrees C, Water pressure : 200kPa (gauge pressure)) | |
| Connection （Socket） | Rp1/4 （With hose fitting "Kantouch"） | |
| Recommended house※ | Tetoron Braided hose (O.D.dia.15mm×I.D.dia.9mm) | |
※Please prepare the cooling water piping.
Dimension drawing
VPC-1100
Evaporation Electrode SEREM
Feedthrough Collar
Basic composition
※We customize according to the purpose of research and development.
| [1] | Plate |
| [2] | Filter |
| [3] | Service port (L) |
| [4] | Service port (S) |
| [5] | Gauge port |
| [6] | Hermetic seal port.3 pcs. |
| [7] | Shutter |
| [8] | Electrode COM |
| [9] | Electrode 1 |
| [10] | Electrode 2 |
| [11] | Electrode 3 |
