Small Evaporation System Model: VTR-060M/ERH
ULVAC
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It is a small-sized vacuum evaporation system with resistance heating type and low cost type, in which a turbo molecular pump and Sub pump are compactly stored in a frame.
Suitable for experiments such as basic research and development with clean exhaust.
Specification
| Model | VTR-060M/ERH | |
| Specification | Ultimate pressure | 10-４（No load cleaning in the vacuum layer） 1.5×10-３Pa（OptionSpecification） |
| Evacuation time | 4.0×10-３Pa/20min（No load cleaning in the vacuum chumber） | |
| Vacuum chamber | Vacuum chamber | Cylindrical Glass belljar （Φ236mm×Ｈ250mm) |
| Base plate | 7 ports (side ) | |
| Recommended substrate size (Maximum substrate size) | □50mm (□140mm) | |
| Power supply system | Evaporation electrode structure | 1 point |
| Evaporation Electrode /power supply | SEREM “PSE-150C” 1 set 0 - 10V 80A (MAX) |
|
| Exhaust system | Main pump | Turbo molecular pump(Air cooling) 60Ｌ/sec |
| Sub pump | Oil rotary pump20L/min | |
| Oil mist trap | OMT-050A | |
| Operation system | Main valve | Option（Butterfly valve） |
| Sub valve | Option（Three way valve） | |
| Automatic leak valve | Option（solenoid valve） | |
| Vent valve | Option（Leak port） | |
| Control | Manual control | |
| Control system | Gauge | Option (ISG1) |
| Deposition Controller | Option (CRTM-6000G) | |
| Setup | Extreial dimensions Body | 428mm(W)×438mm(D)×713mm(H) |
| Power supply | 480mm(W)×435.3mm(D)×149mm(H) | |
| Weight Body | 50Kg | |
| Power supply | 24Kg | |
Utility
| Model | VTR-060M/ERH | |
| Power required | Body | 100Ｖ Single phase 50/60Hz 0.6kVA |
| Power supply | 100Ｖ Single phase 50/60Hz 0.8kVA | |
| Connection | Body 1Φ 100V | Cabtyre cable (with plug) 4m |
| Power supply 1Φ 200V | Cabtyre cable (with plug) 4m | |
※Please prepare two grounding outlets.
Dimension drawing
VTR-060M/ERH
Evaporation Electrode SEREM
Feedthrough Collar
Basic composition
