Sputtering System

Sputtering System



Small-sized high-frequency sputtering device with an RF power supply.
Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulators.


  • It is sputtering system of an insulator, metal, and a semiconducting material.
  • Oil diffusion pump is used for main pumping.
  • Single deposition is available by dia.80 mm, 1 cathode.
  • Sputtering speed 20nm/min. (SiO2) is available by conventional sputtering.


Model RFS-201
Vacuum performance Ultimate pressure 6.6×10-4Pa
Evacuation time 6.6×10-3Pa/5min
Vacuum chamber Vacuum chamber Metal chamber (200mm(W)×250mm(D)×150mm(H))
Cathode Φ80mm、1way
Standard target Φ80mm×t1-5mm
Effective area of sputtering 50mm
Sputtering speed SiO2 SiO2, more than 20nm/min at deposition
Film thickness distribution SiO2 SiO2, within ±8% at dia.50mm
Substrate heating temperature Max 350℃
Max 350 degrees C 30~50mm(Variable)
Exhaust system Main pump Oil diffusion pump(Water cooling) 150L/sec
Liquid Nitrogen trap Option
Sub pump Oil rotary pump100L/min
Oil mist trap Oil mist trap OMT-100A
Operation system Main valve Clapper valve
Sub valve Three way valve
Automatic leak valve Option
Control Manual control
Control system RF power supply Max 300W (0~300W Variable)
Pirani vacuum gauge G-TRAN
Ionization vacuum gauge Option
Setup Extreial dimensions 764mm(W)×723mm(D)×1648mm(H)
Weight 260kg


Model RFS-201
Power required 200V Single phase 50/60Hz 2.8kVA
Ground terminal A grade (ground resistance/10Ω or less)
Water requirement 5.0 L/min (Water temperature : less than 25 degrees C, Water pressure : 200 ? 300kPa (gauge pressure))
Connection (power supply) Vinyl cabtyre cable (with R2-5 ring tongue terminals) 4m
Connection (ground) Earth cable (sheet copper) 4m
Connection (water piping) Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm) 4m (2 lines)

Dimension drawing


Feedthrough Collar

Basic composition


[1] Chamber
[2] Taeret electrode
[3] Substrate electrode
[4] Shutter
[5] Current guide terminal
[6] Thermocouple introduction terminal
[7] Gauge port
[8] Sample holder
[9] Backing plate
[10] Target
[11] Service port
[12] Front door

Sample holder drawing

[The standard type]


※We customize according to the purpose of research and development.

Optional parts

●Liquid Nitrogen trap ●Ionization vacuum gauge
●Magnetron ●In line trap (OMI-100)
●Turbo molecular pump ●DC power supply
●Introduction gas (2,3 lines) ●Automatic leak valve for oil rotary pump

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept