Print/Download
Vacuum Transfer Robot
ELEC/COVOT Series
COVOT-6
アルバック
COVOT-6 comprises 4 independent arms and is the vacuum transfer robot which realized high throughput.
Features
- independent arms are equipped, two substrates can be exchanged simultaneously.
- 7 axis actuators and enables teaching to each of 4 arms.
- Corresponds to the medium vacuum to 10-1Pa.
Applications
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
Specifications
| Pressure range | to 10-1Pa | |
| Wafer size | 300mm | |
| Number of wafer | 4 | |
| Maximum distance * | 880mm | |
| Rotation | 360° Endless | |
| Z-axis stroke | 90mm | |
| Minimum rotation diameter * | 980mm | |
| Weight capacity (hand is included) | 1kg | |
| Speed | R | Max 1.5sec / full stroke |
| Θ | Max 2.0sec / 180° | |
| Z | Max 1.5sec / 20mm | |
| Position Accuracy | R | ±0.2mm |
| Θ | ±0.2mm | |
| Z | ±0.2mm | |
| Teaching pendant | Attached | |
| Controller | Separation type | |
*Changes by the arm and hand.
