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Vacuum Transfer Robot
ELEC/COVOT Series
COVOT-LC
ULVAC
COVOT-LC is a simple and reasonable vacuum transfer robot without the Z-axis.
Features
- Simple 2 axis robot without the Z axis.
- Built-in controller enables compact equipment layout.
- Corresponds to the high vacuum to 10-5</supPa.
Applications
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
Specifications
| Pressure range | to 10-5Pa | |
| Wafer size | 200mm/300mm | |
| Number of wafer | 1 or 2 | |
| Maximum distance * | 880mm | |
| Rotation | -15° to 375° | |
| Z-axis stroke | - | |
| Minimum rotation diameter * | 802mm | |
| Weight capacity (hand is included) | 1kg | |
| Speed | R | Max 2.5sec / full stroke |
| Θ | Max 2.5sec / 180° | |
| Z | - | |
| Position Accuracy | R | ±0.2mm |
| Θ | ±0.2mm | |
| Z | - | |
| Teaching pendant | Option | |
| Controller | Built-in type | |
*Changes by the arm and hand.
