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Vacuum Transfer Robot
ELEC/COVOT Series
COVOT
アルバック
ULVAC's vacuum transfer robot is introduced a lot of technologies from our experiences as a Vacuum equipment manufacturer.
Features
- Offers variety of arms with various strokes, number of hands and turning radii.
- Enable to use inthe high vacuum(10-6Pa~).
Applications
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
Specifications
| COVOT-LC | ELEC-RZ | COVOT-6-X5 | ||
| Pressure range | to 10-5Pa | to 10-6Pa | to 10-1Pa | |
| Wafer size | 200mm/300mm | 200mm/300mm | 300mm | |
| Number of wafer | 1 or 2 | 1 or 2 | 4 | |
| Maximum distance *1 | 880mm | 1050mm | 880mm | |
| Rotation | -15° to 375° | ±210° | 360° Endless | |
| Z-axis stroke | - | 50mm | 90mm | |
| Minimum rotation diameter *1 | 802mm | 944mm | 980mm | |
| Weight capacity (hand is included) | 1kg | 1kg | 1kg | |
| Speed | R | Max 2.5sec / full stroke | Max 2.5sec / full stroke | Max 1.5sec / full stroke |
| Θ | Max 2.5sec / 180° | Max 3.0sec / 180° | Max 2.0sec / 180° | |
| Z | - | Max 1.5sec / 20mm | Max 1.5sec / 20mm | |
| Position Accuracy |
R | ±0.2mm | ±0.1mm | ±0.2mm |
| Θ | ±0.2mm | ±0.2mm | ±0.2mm | |
| Z | - | ±0.2mm | ±0.2mm | |
| Teaching pendant | Option | Attached | Attached | |
| Controller | Built-in type | Separation type | Separation type | |
*It depends on arm models and hands.
Arm selection list
| Standard arm | Standard arm | Arm for COVOT-LC | Arm for COVOT-6 |
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| Arm model | 252 | 271 | 325 | 419 | 424 | FRV | CV6 |
| Maximum distance (mm) *1 |
700 | 760 | 880 | 1040 | 1050 | 740 | 880 |
| Minimum rotation diameter (mm) *1 |
606 | 644 | 802 | 940 | 964 | 600 | 980 |
| Number of wafer |
1or 2 | 1 | 4 | ||||
| Outline drawing *2 |
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Arm for COVOT-6 |
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| ELEC-RZ | ○ | ○ | ○ | ○ | ○ | × | × |
| COVOT- LC |
○ | ○ | ○ | × | × | ○ | × |
| COVOT-6 | × | × | × | × | × | × | ○ |
*1 Maximum distance is referential value when the robot use our hand for Φ300mm (option).
*2 Hand(Pick-up) is not included our robot. Please ask us when you need it.
Dimension drawing
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