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Vacuum Transfer Robot
ELEC/COVOT Series
ELEC-RZ
ULVAC
ELEC-RZ is the wafer transfer robot in the high vaccum environment, implemented with compact and low cost based on outstanding function and performance of COVOT series.
Features
- Magnetic fluid sealing is adopted as a vacuum seal, and it corresponds to the high vacuum to 10-6Pa.
- Achieved a compact design by miniaturizing the actuator enables easy impelementation to the equipment.
- Offers variety of arms with various strokes, number of hands and turning radii.
- Achieved excellent operability by adopting with the multi-function display teaching pendant.
Applications
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
Specifications
| Pressure range | to 10-6Pa | |
| Wafer size | 200mm/300mm | |
| Number of wafer | 1 or 2 | |
| Maximum distance * | 1050mm | |
| Rotation | ±210° | |
| Z-axis stroke | 50mm | |
| Minimum rotation diameter * | 944mm | |
| Weight capacity (hand is included) | 1kg | |
| Speed | R | Max 2.5sec / full stroke |
| Θ | Max 3.0sec / 180° | |
| Z | Max 1.5sec / 20mm | |
| position Accuracy | R | ±0.1mm |
| Θ | ±0.2mm | |
| Z | ±0.2mm | |
| Teaching pendant | Attached | |
| Controller | Separation type | |
*Changes by the arm and hand.
