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Cold Cathode Gauge
SC1
SC1
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G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.
Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected.
Ease of maintenance reduces the cost of ownership.
Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected.
Ease of maintenance reduces the cost of ownership.
Features
- Transducer specification
When the pressure display is not required, the following advantages can be achieved:
? Vacuum gauge cost is reduced because the display has been eliminated
? Smaller size frees-up control panel space
? Wiring is reduced - Maintenance is greatly simplyfied
- Filament is eliminated: No damage from exposure to atmospheric pressure
- Control output sign: 2 setpoint output
- Output signal: Pressure reading is a 0 to 10V Log output (non-linear output)
- Power supply voltage: Operated by DC24V
Applications
- Process control in the pressure range of precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
- Process control in low vacuum range for industrial equipment such as furnaces
- Process control in the pressure range for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment
Specifications
| Type | Sensor unit | ||
| Model | SC1 | ||
| Compatible sensor head | C-21、23、24、25 | ||
| Measurement pressure range | 1.0×10-5 to 1.0 Pa | ||
| 7.5×10-8 to 7.5×10-3 Torr | |||
| 1.0×10-7 to 1.0×10-2 mbar | |||
| Accuracy | ＋100%,－50%（1.0×10-4 to 1.0×10-1 Pa） | ||
| ＋100%,－50%（7.5×10-7 to 7.5×10-4 Torr） | |||
| ＋100%,－50%（1.0×10-6 to 1.0×10-3 mbar） | |||
| Measurement value output | Nonlinear output: 0 to 10VDC | ||
| Pressure setting adjustment monitor | Nonlinear output: 0 to 10VDC | ||
| Control input signal | HV ON/OFF | ||
| Control output signal | Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2 | ||
| Control output signal | Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2 | ||
| LED display | POWER, HV, PROTECT, SETPOINT1/2 | ||
| Operating temperature range | 10 to 40℃（50 to 104°F） | ||
| Operating humidity range | 15 to 80%（not condensing） | ||
| Power supply voltage | DC24V±2V, 150mA | ||
| Input/Output connector | D-sub-15pin（M2.6 screw） | ||
| Weight | 430g（Excluding sensor head） | ||
| Standard accessories | Input/Output connector 1pc | ||
| Quick manual 1pc |
* IO and analog GND are not isolated from the power GND.
