Screw Type Dry Vacuum Pump

LS Series

LS

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High pumping speed and Low power consumption dry vacuum pump.
LS series is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.

Features

          • 'High pumping speed
            High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
          • Low power consumption
            ECO-SHOCK technology realizes low power consumption. (C Type)
            Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
          • Built-in silencer achieves the noise level 61dB(A) or less.
          • Low running-cost
            No shaft sealing gas.
            *Purge gas is available with L Type.
          • Pumping speed120~1200m3/h Class *With mecanical booster pump
            Optimum model is selectable by depending on the application

LS120+DRP_speed_curve.png LS120A+DRP_time_curve.png

Applications

C type      : Clean process (LS***A-C)
Feature      : Low power consumption model (with built-in ECO-SHOCK)
Applications   : For clean process such as air and N2 G14 Sputtering / Vapor deposition /
         Lamination / Load lock room / TMP backing pump etc.


L type      : Light process (LS***A-L)
Features    :Light process model (with surface treatment and purge function)
Applications   : For light process such as steam and volatile liquid medicine / Vacuum drying /
         Freezedrying / Ashing / General industrial use etc.

Specifications

Model  (C:C Type)
 (L:L Type)
LS120A LS300A LS600A LS1200A
C L C L C L C L
Max.pumping speed m3/h 120 380 600 1000
Ultimate pressure Pa ≦0.6 ≦0.1
Power supply 200V Class:3Phase,50/60Hz,AC200-240V or 400V Class:3Phase,50/60Hz,AC380-480V
Power consumption *1 kW 0.6 2.0 1.0 2.5 1.3 2.6 1.3 2.7
Cooling water
flow rate
L/min >2.0 >4.0
Purge gas flow rate
*2
SLM 0~50 0~50 0~50 0~50
Max.water vapor
tolerance *3
kg/h 1.5 1.5 1.5 1.5
Noise *1 dB(A) 61 61 62 64
Inlet port Inlet port
KF50(Horizontal)/
VG50(Vertical)
ISO-F-50 ISO-F-80 ISO-F-100
Outlet port KF40 KF40 KF40 KF40
Weight kg 142 220 242 266
Applicable standard CE、cTUVus
Standard accessory Power connector, Waterproof cable clamp, Remote connector, Guard for power connector
Pump head option Power supply:200V Class or 400V Class, Material of seal:FFKM(L type only)
External option MBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible
Unit(Inlet, Remote), Purge gas valve

*1:  At ultimate pressure (reference only)
*2:  Purge gas is not available with C Type.
*3:  Max.water vapor tolerance is a value when purge gas is used.
Note)C type is not leakless.

Pumping Speed Curves

  • LS120A
    LS120_curve.png
  • LS300A
    LS300A_curve.png
  • LS600A
    LS600A.png
  • LS1200A
    LS1200A_curve.png

Dimension drawing

LS_size_e.png

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