Screw Type Dry Vacuum Pump
- High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
- ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
- Built-in silencer achieves the noise level 61dB(A) or less.
- Low running-cost
No shaft sealing gas.
※Purge gas is available with L Type.
- 4 Pumping speed120~1200m3/h Class ※With mecanical booster pump
Model is selectable with the optimum pumping speed according to the application.
C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.
|Max. pumping speed||m3/h||120||380||600||1000|
|Power supply||200V Class : 3Phase, 50/60Hz, AC200-240V or 400V Class : 3Phase, 50/60Hz, AC380-480V|
|Power consumption ※1||kW||0.6||2.0||1.0||2.5||1.3||2.6||1.3||2.7|
|Cooling water flow rate||L/min||>2.0||＞4.0|
|Purge gas flow rate ※2||SLM||ー||0～50||ー||0～50||ー||0～50||ー||0～50|
|Max. water vapor tolerance ※3||kg/h||ー||1.5||ー||1.5||ー||1.5||ー||1.5|
|Applicable standard||CE, cTUVus|
|Standard accessory||Instruction manual(CD-R), Power connector, Waterproof cable clamp, Remote connector, Guard for power connector|
|Pump head option||Power supply : 200V Class or 400V Class, Material of seal : FFKM(L type only)|
|External option||MBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve|
※1： At ultimate pressure (reference only) ※2：Purge gas is not available with C Type. ※3： Max.water vapor tolerance is a value when purge gas is used. ※4：C type is not leakless.
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