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Screw Type Dry Vacuum Pump

MS Series

MS

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MS series is a vacuum pump which is categorized as screw type dry vacuum pump.
Corrosion resistance and powder exhaust are improved as process resistance model based on traditional LS series.
This model is designed for the process of using corrosion gas and powder exhausting.

Features

  • Corrosion resistance by treating special coating for main parts such as rotor shaft and cylinder
  • High performance of powder exhausting by applying ULVAC's unique design rotor shaft
  • Realize continuous pumping near atmospheric pressure

Applications

  • Vacuum system for semiconductor and electronic device manufacturing equipment
    Etching, Ashing, Plasma cleaning, etc.
  • Vacuum system for furnace
    Sintering, Carburizing, etc.
  • Vacuum system for Li-ion battery manufacturing equipment
    Electrode drying, Degassing, Vacuum injection, etc.
  • Vacuum system for medical and food
    Freeze dry, Vacuum dry, etc.

*MS1200A is available separately with additional control board and sensors.Please contact us for details.

Specifications

Model MS120A MS600A MS1200A
Max.pumping speed *1 m3/h 115 560 980
Ultimate pressure Pa ≦0.6 ≦0.1
Power supply 200V Class:3Phase, 50/60Hz, AC200-240V±10% or 400V Class:3Phase, 50/60Hz, AC380-480V±10%
Power consumption *2 kW 2.4 3.1 3.1
Cooling water flow rate L/min >4.0
Purge gas flow rate *1 SLM 0~50
Max.water vapor tolerance *1*3 kg/h 1.5
Noise *2 dB(A) 61 62 64
Inlet port KF50(Horizontal) / VG50(Vertical) ISO-F-80 ISO-F-100
Outlet port KF40
Weight *4 kg 139 241 264
Applicable standard CE、cTUVus
Standard accessory Quick manual, Power connector, Waterproof cable clamp, Remote connector, Guard for power connector, Silencer
Pump head option Power supply:200V Class or 400V Class
Material of seal:FKM or FFKM
External option Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve

*1:reference value
*2:At ultimate pressure (reference only)
*3:Max.water vapor tolerance is a value when purge gas is used.
*4:Including a silencer

Pumping Speed Curves

  • MS120A
    ms120a_curve.png
  • MS600A
    ms600a_curve.png
  • MS1200A
    ms1200a_curve.png



Dimension drawing

ms_size_e2.png

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