Mechanical Booster Pump

PRC Series

PRC

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By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.

Features

  • Oil-free
    No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors.
  • Canned motor
    Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern.
  • Excellent Corrosion Resistant Surface Treatment
    Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option.
  • Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
    This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.

Applications

  • Evaporation, sputtering, ion plating,Vacuum dryer, freeze dryer, vacuum degassing
  • Analytical instruments, leak test system,Gas exchange, filling, vacuum insulating
  • Heat treatment, melting furnace
  • Other various kind of vacuum system

Specifications

Model *1 PRC-003A PRC-006A PRC-012A PRC-018A
Maximum pumping
speed
50Hz 280 m3/h
(4670 L/min)
500 m3/h
(8330 L/min)
1000 m3/h
(16700 L/min)
1500 m3 /h
(25000 L/min)
60Hz 330 m3/h
(5500 L/min)
600 m3/h
(10000 L/min)
1200 m3/h
(20000 L/min)
1800 m3/h
(30000 L/min)
Maximum suction
pressure
50Hz 1.2 x 103 Pa 1.3 x 103 Pa 1.2 x 103 Pa
60Hz 9.3 x 102 Pa 1.1 x 103 Pa 9.3 x 102 Pa

Maximum allowable
differential pressure

50Hz 4.0 x 103 Pa 7.3 x 103 Pa 4.3 x 103 Pa
60Hz 3.3 x 103 Pa 6.0 x 103 Pa 3.2 x 103 Pa
Ultimate pressure *2 4.0 x 10-1 Pa 6.7 x 10-1 Pa
Allowable drive pressure ~1.0 x 105 Pa(atmospheric pressure start type)
Motor *3 Type of motor Cand 3 phase induction motor
Energy efficiency
class
Power 0.75 kW(2 poles) 2.2 kW(2 poles) 3.7 kW(2 poles) 5.5 kW(2 poles)

Voltage
(200V
class)
50Hz 200 V
60Hz 200/220 V
Oil *4
ULVOIL R-42
Oil quantity   0.7 L 1.5 L 1.9 L
Cooling method   Water cooling
Cooling
water
Primary side
pressure
0.3 Mpa
Inlet / outlet
differentia
l pressure
volume
0.01 Mpa以上
Cooling water
capacity
2 L/min 32 L/min
Cooling water
temperature *5
5 ~ 30 ℃
Inlet port JIS-B-2290 VG80 equivalent /
ISO80F or ISO100F (optional)
VG100
equivalent /
ISO100F
(optional)
VG150
equivalent /
ISO160F
(optional)
Outlet port JIS-B-2290 VF80 equivalent / ISO80F or ISO100F (optional) VF100
equivalent /
ISO100F
(optional)
Dimension W×D×H *6 296×575×260
mm
356×619×320
mm
406×759×340
mm
406×989×340
mm
Weight 51 kg 86 kg 118 kg 150 kg
Standard roughing pump VD601 VD901
VS2401
VS2401
Applicable standard -
Standard accessory A dose of oil, a set of manual
Option Pump without surface treatment, adapter flange,
Atmospheric pressure start type (Inverter),

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
  4.0 x 10-1 Pa = 3.0 x 10-3 Torr

*1 Standard model are with surface treatment (Anodic oxidation coatings).
  Optionaly, without surface treatment model is able to select.
*2 Measured by Pirani vacuum gauge using a standard backing pump and standard vacuum oil.
*3 Explosion-proof flange motors ( increased safety type and flameproof enclosure type )
  are not available to select.
*4 Oil option : Optionaly, Synthetic oil (R-7000) or Fluorine oil (J25F) type is able to select.
*5 Use in an environment where there is no condensation.
*6 For other dimensions, visit ULVAC web and refer to the posted CAD data.

Pumping Speed Curves

PRC-003A/006APRC-003A,006A_curve.png PRC-012A/018APRC-012A,018A_curve.png

Dimension drawing

PRC_size.png
  PRC-003A PRC-006A PRC-012A PRC-018A
W 296 356 406 406
D 575 619 759 989
H 260 320 340 340

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