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Mechanical Booster Pump
PRC Series
PRC
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By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
Features
- Oil-free
No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors. - Canned motor
Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern. - Excellent Corrosion Resistant Surface Treatment
Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option. - Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.
Applications
- Evaporation, sputtering, ion plating,Vacuum dryer, freeze dryer, vacuum degassing
- Analytical instruments, leak test system,Gas exchange, filling, vacuum insulating
- Heat treatment, melting furnace
- Other various kind of vacuum system
Specifications
| Model *1 | PRC-003A | PRC-006A | PRC-012A | PRC-018A | ||
| Maximum pumping speed |
50Hz | 280 m3/h （4670 L/min） |
500 m3/h （8330 L/min） |
1000 m3/h （16700 L/min） |
1500 m3 /h （25000 L/min） |
|
| 60Hz | 330 m3/h （5500 L/min） |
600 m3/h （10000 L/min） |
1200 m3/h （20000 L/min） |
1800 m3/h （30000 L/min） |
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| Maximum suction pressure |
50Hz | 1.2 x 103 Pa | 1.3 x 103 Pa | 1.2 x 103 Pa | ||
| 60Hz | 9.3 x 102 Pa | 1.1 x 103 Pa | 9.3 x 102 Pa | |||
|
Maximum allowable |
50Hz | 4.0 x 103 Pa | 7.3 x 103 Pa | 4.3 x 103 Pa | ||
| 60Hz | 3.3 x 103 Pa | 6.0 x 103 Pa | 3.2 x 103 Pa | |||
| Ultimate pressure *2 | 4.0 x 10-1 Pa | 6.7 x 10-1 Pa | ||||
| Allowable drive pressure | ～1.0 x 105 Pa（atmospheric pressure start type） | |||||
| Motor *3 | Type of motor | Cand 3 phase induction motor | ||||
| Energy efficiency class |
ー | |||||
| Power | 0.75 kW（2 poles） | 2.2 kW（2 poles） | 3.7 kW（2 poles） | 5.5 kW（2 poles） |
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| Voltage (200V class) |
50Hz | 200 V | ||||
| 60Hz | 200/220 V | |||||
| Oil *4 |
ULVOIL R-42
|
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| Oil quantity | 0.7 L | 1.5 L | 1.9 L | |||
| Cooling method | Water cooling | |||||
| Cooling water |
Primary side pressure |
0.3 Mpa | ||||
| Inlet / outlet differentia l pressure volume |
0.01 Mpa以上 | |||||
| Cooling water capacity |
2 L/min | 3 L/min | ||||
| Cooling water temperature *5 |
5 ～ 30 ℃ | |||||
| Inlet port JIS-B-2290 | VG80 equivalent / ISO80F or ISO100F (optional) |
VG100 equivalent / ISO100F (optional) |
VG150 equivalent / ISO160F (optional) |
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| Outlet port JIS-B-2290 | VF80 equivalent / ISO80F or ISO100F (optional) | VF100 equivalent / ISO100F (optional) |
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| Dimension W×D×H *6 | 296×575×260 mm |
356×619×320 mm |
406×759×340 mm |
406×989×340 mm |
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| Weight | 51 kg | 86 kg | 118 kg | 150 kg | ||
| Standard roughing pump | VD601 | VD901 |
VS2401
|
VS2401 | ||
| Applicable standard | - | |||||
| Standard accessory | A dose of oil, a set of manual | |||||
| Option | Pump without surface treatment, adapter flange, Atmospheric pressure start type (Inverter), |
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Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
4.0 x 10-1 Pa = 3.0 x 10-3 Torr
*1 Standard model are with surface treatment (Anodic oxidation coatings).
Optionaly, without surface treatment model is able to select.
*2 Measured by Pirani vacuum gauge using a standard backing pump and standard vacuum oil.
*3 Explosion-proof flange motors ( increased safety type and flameproof enclosure type )
are not available to select.
*4 Oil option : Optionaly, Fluorine oil (J25F) type is able to select.
*5 Use in an environment where there is no condensation.
*6 For other dimensions, visit ULVAC web and refer to the posted CAD data.
Pumping Speed Curves
PRC-003A/006A |
PRC-012A/018A |
Dimension drawing
| PRC-003A | PRC-006A | PRC-012A | PRC-018A | |
| W | 296 | 356 | 406 | 406 |
| D | 575 | 619 | 759 | 989 |
| H | 260 | 320 | 340 | 340 |
