Multi-Stage Roots Type Dry Vacuum Pump
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Multi-stage Roots type dry vacuum pumps are mechanical vacuum pumps that do not use oil or liquids in the vacuum chamber.
In fields such as FPD, electronics, and semiconductor industries, a cleaner vacuum is required, and vacuum pumps are needed to improve yields and ease of maintenance. A typical example of such pumps is the Roots type dry vacuum pump.
A multi-stage Roots type dry vacuum pump has two three-leaf rotors inside a box called a casing, which rotate in opposite directions at the same speed via a pair of gears. The rotors, and the rotors and casing, do not come into contact with each other, and they rotate while maintaining a small gap to transport and compress gas. The rotors have a multi-stage structure, compressing the gas to atmospheric pressure and exhausting it into the atmosphere. No sealing liquids such as oil are used inside the rotors and casing, allowing for clean exhaust. Oil is used for lubrication in the gears and bearings, but a special seal structure is used to prevent oil from entering the casing.
Multi-Stage Roots Type Dry Vacuum Pump
Model:HR
Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.
Multi-Stage Roots Type Dry Vacuum Pump
Model:LR
Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.
Multi-Stage Roots Type Dry Vacuum Pump
Model:GR
Based on many years of experience with the "Model:LR/HR" ULVAC has introduced the "Model:GR" Dry Vacuum pump with a simple and clean design for general industrial applications.
Multi-Stage Roots Type Dry Vacuum Pump
Model:CR
Dry Vacuum Pump "Model:CR" Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder.
Features
Multi-Stage Roots Type Dry Vacuum Pump
Model:RS
This is an optional product to reduce pumping noise when using a dry pump.
Multi-Stage Roots Type Dry Vacuum Pump
Model:ECO-SHOCK
ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption
by attaching to the dry pump exhaust line
Multi-Stage Roots Type Dry Vacuum Pump
Model:RDA-281H
Six-stage / with Thermostat
Multi-Stage Roots Type Dry Vacuum Pump
Model:RDA-501H
Six-stage / with Thermostat