Multi-Stage Roots Type Dry Vacuum Pump Model: RS
ULVAC
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This is an optional product to reduce pumping noise when using a dry pump.
Features
- Excellent sound deadening effect.
- Can be connected to the pump exhaust port with a clamp.
Specifications
| Silencer Kit type | Agreement | Option | |||
| Clamp | Outer ring | Connection Flange |
Stay | ||
| RS-01 kitA | CR60B,LR60,90,300,GR60A,90A | 1 | 1 | ー | ー |
| RS-01 kitB | LR600,1200 | 2 | 2 | 1 | 1 |
| RS-01 kitC | CR300B,GR180A | 2 | 2 | 1 | 1 |
| RS-01 kitD | CR16B,30B | 1 | 1 | 1 | ー |
| RS-02 kitA | LR180(LR60,90,300) | 2 | 2 | 1 | 1 |
| RS-02 kitB | LR1800(LR600,1200) | 2 | 2 | 1 | 1 |
| RS-03 kitA | LR421(-T) | 1 | 1 | 1 | 1 |
| RS-03 kitB | LR3601(-T/TT/R/TR/TTR) | 3 | 3 | 1 | 1 |
| EFS-11-NW 25/2/2516 *1 |
CR16B,30B | 1 | 1 | ー | ー |
| EFS-19-NW 40/1 *1 *2 |
CR60B,300B | 1 | 1 | ー | ー |
*2 It is an open type that can not be connected to the rear piping.
Noise reductio effect (Reference value)
Unit: dB(A)| Model | Power supply frequency | Silencer | Noise reduction | |
| W/o | With | |||
| RS-01 | 50Hz | 81 | 70 | 11 |
| 60Hz | 88 | 69 | 19 | |
| RS-02 | 50Hz | 84 | 72 | 12 |
| 60Hz | 93 | 73 | 20 | |
| RS-03 | 50/60Hz | 71 | 67 | 4 |
*1 Operation condiion with 5SLM of N2parge gas at ultimate pressure.
Dimension drawing
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