Multi-Stage Roots Type Dry Vacuum Pump Model: ZR

ULVAC

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ZR120A-S is a multi-stage, Roots-type pump. Designed specifically for the semiconductor and electronic component industries,
it is equipped with various sensors and a controller.
Consolidating all necessary operational interfaces onto a single side offers greater installation flexibility.
The controller enables sensor data and operational status to be monitored, and a built-in silencer reduces operating noise.

Model: ZR120A-S

Features

Reduced footprint：55% reduction compared to conventional models
Low power consumption：35% reduction compared to conventional models
Improved operability：Controller included as standard
Continuous operation function：Automatically optimizes output
Low noise：56dB(A) or less
Applicable standard：CE、cTUVus、SEMI-S2

Applications

Light-load applications in the semiconductor and electronic component industries (clean rooms)
Sputtering equipment
Load-lock chambers
Deposition equipment, etc.
Backing pumps for turbomolecular pumps
General vacuum evacuation applications for clean processes
(Excluding corrosive or condensable gases)

Specifications

Model			ZR120A-S
Pumping speed^*1		m³/ hr	105
Ultimate pressure^*2		Pa	≦3
Power supply		V	3相 200-240±10% 50／60Hz
		V	3相 380-480±10% 50／60Hz
Power consumption^*1	At.Ultimate pressure	kW	0.4
	At.Max load		2.2
Cooling water flow rate		L / min	>1.5
Purge gas flow rate^*1		SLM	12.5
Noise^*1	At.Ultimate pressure	dB(A)	56
Inlet port			KF50
Outlet port			KF25
Dimensions	W	mm	230
	D		449
	H		274
Weight		kg	60
Applicable standard			CE、 cTUVus、SEMI-S2

*1：reference value
*2：w/o purge gas

Pumping Speed Curves

Dimension drawing

ZR120A-S

Support for Model: ZR
Download

Features

Reduced footprint：55% reduction compared to conventional models

Low power consumption：35% reduction compared to conventional models

Improved operability：Controller included as standard

Continuous operation function：Automatically optimizes output

Low noise：56dB(A) or less

Applicable standard：CE、cTUVus、SEMI-S2

Applications

Light-load applications in the semiconductor and electronic component industries (clean rooms)
Sputtering equipment
Load-lock chambers
Deposition equipment, etc.

Backing pumps for turbomolecular pumps

General vacuum evacuation applications for clean processes
(Excluding corrosive or condensable gases)

Specifications

Model			ZR120A-S
Pumping speed^*1		m³/ hr	105
Ultimate pressure^*2		Pa	≦3
Power supply		V	3相 200-240±10% 50／60Hz
		V	3相 380-480±10% 50／60Hz
Power consumption^*1	At.Ultimate pressure	kW	0.4
	At.Max load		2.2
Cooling water flow rate		L / min	>1.5
Purge gas flow rate^*1		SLM	12.5
Noise^*1	At.Ultimate pressure	dB(A)	56
Inlet port			KF50
Outlet port			KF25
Dimensions	W	mm	230
	D		449
	H		274
Weight		kg	60
Applicable standard			CE、 cTUVus、SEMI-S2

*1：reference value
*2：w/o purge gas